Micromachining of Silicon

Meanwhile, a Pyrex glass plate was patterned with metal electrodes. Then the Pyrex plate was bonded to the Si wafer using the anodic bonding process. The etching, access-hole drilling, and bonding processes are described in more detail in subsequent sections. 

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Cutting-edge Silicon-based Micromachined Sensors for Next Generation Household Appliances 205 5.8.1.3.3 Surface Micromachining of Silicon... 

D Processing Technology 200 Sensors, Actuators and Passive Components 201 Bulk Micromachining Technology 201 Surface Micromachining of Silicon 205 Summary 205... 

Three-dimensional electrode arrays have been fabricated using two very different micromachining methods. One approach, named carbon MEMS or C-MEMS, is based on the pyrolysis of photoresists. The use of photoresist as the precursor material is a key consideration, since photolithography can be used to pattern these materials into appropriate structures. The second approach involves the micromachining of silicon molds that are then filled with electrode material. Construction of both anode and cathode electrode arrays has been demonstrated using these microfabrication methods. 

A second approach for fabricating electrode arrays has involved micromachining of silicon molds, which are filled with electrode material by colloidal processing methods. In contrast to G-MEMS, this fabrication approach is suitable for both anodes and cathodes, as one merely alters the composition of the powders. The process flow for electrode array fabrication is depicted in Figure 23. 

Mahajan, Deformation Behavior of Compound Semiconductors J. P. Hirth, Injection of Dislocations into Strained Multilayer Structures D. Kendall, C. B. Fleddermann, and K. J. Malloy, Critical Technologies for the Micromachining of Silicon... 

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M. Bassu, L.M. Strambini, G. Barillaro, Advances in electrochemical micromachining of silicon towards MEMS fabrication, ProcediaEng. 25 (2011) 1653-1656. 

Anisotropic silicon micromachining Bulk micromachining of silicon... 

Kovacs GTA, Maluf NI, Petersen KE (1998) Bulk micromachining of silicon. Proc IEEE 86(8) 1536-1551... 

The development of MEMS devices can be traced back to the 1970s, when micromachining of silicon was first investigated for the manufacture of mechanical devices. The MEMS market is now dominated... 

Irradiation with ions was used on monocrystalline substrates prior to anodization, in order to manage the porous silicon properties. This allows technique of 3D micromachining of silicon... 

Teo EJ, Tavernier EP, Breese MBH, Bettiol AA, Watt F, Liu MH, Blackwood DJ (2004) Three-dimensional micromachining of silicon using a nuclear microprobe. Nucl Instrum Methods... 

Mlcak R, Tuller HL, Greiff P, Sohn J, NUes L (1994) Photoassisted electrochemical micromachining of silicon in HF electrolytes. Sens Actuators A 40 49-55... 

Miyoshi Y, Miyajima K, Saito H, Kndo H, Takenchi T, Karube I, Mitsnbayashi K (2009) Flexible hnmidity sensor in a sandwich confignration with a hydrophilic porons membrane. Sens Actnators B 142 28-32 Mlcak R, Tnller HL, Greiff P, Sohn J, Niles L (1994) Photoassisted electrochemical micromachining of silicon in HF electrolytes. Sens Actnators A 40 49-55... 

Bulk micromachining of silicon Anisotropic silicon micromachining... 

Micromolding, Figure 1 Bulk micromachining of silicon masters... 

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