Electrochemical micromachining fabrication

Karube and Yokoyama presented an overview on the developments in the biosensor technology [60]. The overview describes the use of micromachining fabrication techniques for the construction of detection units for FIA, electrochemical flow cells and chemiluminescence detectors. Acetylcholine microsensors using carbon fiber electrodes and glutamate microsensors for neuroscience were discussed. 

Fabrication of 3D Metallic and 3D Ceramic Microstructures Based on Electrochemical Micromachining of A1... 

Fig. 13.1 Ink-jet nozzle plate fabricated by through-mask electrochemical micromachining, Schematic of the concept top), and a photograph showing an array of nozzles bottom) [23]...

Datta M (1995) Fabrication of an array of precision nozzles by through-mask electrochemical micromachining. J Electrochem Soc 142 3801-3805... 

FIGURE 2.17. A series of microstructures on stainless steel fabricated by the electrochemical micromachining technique [15]. 

V. Rathod, B. Doloi, B. Bhattacharyya, Parametric investigation into the fabrication of disc microelectrodes by electrochemical micromachining, J. Micro Nano-Manuf., ASME 1 (2013) 041005-1-11, http //dx.doi.org/ 10.1115/1.4025977. 

V.K. Jain, S. Kalia, A. Sidpara, V. Kulkarni, Fabrication of micro-features and micro-tools using electrochemical micromachining, Int. J. Adv. Manuf. Technol. 61 (9-12) (2012) 1175 1183. 

Y. Ferri, O. Piotrowski, P.-F. Chauvy, C. Madore, D. Landolt, Two-level electrochemical micromachining of titanium for device fabrication, J. Micromech. Microeng. 11 (2001) 522-527. 

M. Bassu, L.M. Strambini, G. Barillaro, Advances in electrochemical micromachining of silicon towards MEMS fabrication, ProcediaEng. 25 (2011) 1653-1656. 

Regular micropatterns fabricated by electrochemical micromachining for surface structuring [13]. 

Spiral trench on Ni sheet fabricated by electrochemical micromachining [32]. 

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