Micromachining technology

The dimension of machine elements has been reduced continuously in recent years with the advance of micromachining technology, and the separation between surfaces in rela-... 

D Processing Technology 200 Sensors, Actuators and Passive Components 201 Bulk Micromachining Technology 201 Surface Micromachining of Silicon 205 Summary 205... 

The latest advancement in femtosecond (fs)-based micromachining technology has opened a new window of opportunity for fabrication of microdevices. Direct exposure of most solid materials (including fused silica glass) to high power fs laser pulses may lead to the ablation of a thin layer of materials at the laser focal point13. Due to the multiphoton nature of the laser-material interaction, the ablation process can be conducted on the material surface as well as within its... 

There are numerous advantages of amperometric detection on-chip. These include (1) the detector has a minimal dead volume (2) preparation of electrodes (working) is compatible with the planar micromachining technology (3) the electrodes can be miniaturized without compromising LOD and (4) the EC detection has a short response time [746]. 

Electrochemical detection offers also great promise for CZE microchips, and for other chip-based analytical microsystems (e.g., Lab-on-a-Chip) discussed in Section 6.3 (77-83). Particularly attractive for such microfluidic devices are the high sensitivity of electrochemical detection, its inherent miniaturization of both the detector and control instrumentation, low cost, low power demands, and compatibility with micromachining technologies. Various detector configurations, based on different capillary/working-electrode... 

The feasibility of miniaturizing thermal biosensors in different constructions, sizes and materials,by employing conventional machining and micromachining technologies could be further exploited in several directions. The miniaturiza-... 

EDM is one of the most commonly used unconventional micromachining technologies. The process is limited to electrically conductive materials. Electrical arcs are produced in a controlled way between the tool and the workpiece in order to achieve material removal by melting and evaporation. 

Commercially available translation stages are well suited for this purpose. Care should be taken when selecting the controller of the manipulator. Because SACE is still an unconventional micromachining technology, a controller that is as flexible as possible should be selected. Thus, different improvements can be made to the process. 

Neul, A low cost angular rate sensor for automotive applications in surface micromachining technology, Proc. Advanced Microsystems for Automotive Applications 99 (eds D. E. Ricken, W. Gessner), Springer, Berlin, Germany, 1999, 239-250 ... 

R. Neul, A low cost angular rate sensor in Si-surface micromachining technology for automotive applications SAE Technical Digest Series 990931, 1999. 

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