Micromachining of Glass

FIGURE 2.3 Sequence for fabrication of the glass microfluidic chip, (a) Cr and Au masked glass plate coated with photoresist (b) sample exposed to UV light through a photomask (c) photoresist developed (d) exposed metal mask etched (e) exposed glass etched (f) resist and metal stripped (g) glass cover plate bonded to form sealed capillary [102]. Reprinted with permission from American Chemical Society. 

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Giridhar MS, Seong K, Schulzgen A, Khulbe P, Peyghambarian N, Mansuripur M. Femtosecond pulsed laser micromachining of glass substrates with application to microfluidic devices. Appl Opt 2004 43 4584-9. 

Takeuchi, Y., Sawada, K., and Sata, T., Ultra-precision 3-D micromachining of glass, Annu CIRP, 45,1 (1996) 401. 

Bulk micromachining of glass-based materials is a simple, fast, and low-cost way to fabricate planar microfluidic devices. Here we present a fast... 

The suitability of excimer lasers for the micromachining of glasses remains limited even though high ablation rates were obtained, because of the rough surface topography and poorly defined edges of the fabricated structures. 

Frequently the opposite effect as just described is the object of interest. Not the micromachining of glass is desired, but the resistance of high pure... 

Fan, Z. H., and Harrison, D. J. (1994). Micromachining of capillary electrophoresis injectors and separators on glass chips and evaluation of flow at capillary intersections. Anal. Chem. 66, 177. 

Name three kinds of glass substrates commonly used to fabricate microchips. Describe the process of photolithography used in glass micromachining. (5 marks)... 

Manz, A., Fettinger, J.C., Verpoorte, E., Liidi, H., Widmer, H.M., Harrison, D.J., Micromachining of monocrystalline silicon and glass for chemical analysis systems. Trends. Anal. Chem. 1991, 10, 144—149. 

Localized Heat Glass-Thermoplastic Bonding For this approach, the microfluidic channel is micromachined into glass or silicon. On the bonding surface of the chip, close to the channel rim, metallic (aluminum) heater elements are... 

Fig.l Schematic of the fabrication processes used in planar microfabrication. The methods have been adapted to micromachining of surfaces to produce microstructured sensors, particularly those involved in producing gold planar microelectrodes on glass, used in electronic Petri dishes. (The schematic is reproduced from Ref [31], although more details of the processes involved can be found in Ref. [9].)... 

Micromachining of the CE column and liquid handling systems has been accomplished by Dr. Jed Harrison of the University of Alberta. This technology allows for the design of full CE systems on etched glass plates and has tremendous potential for construction of compact, transportable and inexpensive CE instruments. (33)... 

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