Advanced micromachining

Kalinowski T, Rittersma ZM, Benecke W, Binder J (2000) An advanced micromachined fermentation monitoring device. Sens Actuators B 68 281-285 Kronast W, Muller B, Siedel W et al (2001) Single-chip condenser microphone using porous silicon as sacrificial layer for the air gap. Sens Actuators A 87(3) 188-193 Lammel G, Renaud P (2000) Free-standing, mobile 3D porous silicon microstructures. Sens Actuators A 85(l-3) 356-360... 

S. Nakano, H. Ogiso, A. Yabe. Advanced micromachine fabrication using ion implanted layers,... 

The dimension of machine elements has been reduced continuously in recent years with the advance of micromachining technology, and the separation between surfaces in rela-... 

RECENT ADVANCES AND FUTURE PERSPECTIVES 4.1 Micromachining Techniques... 

With the advancing automatization and computerization of CE instruments, the application of micromachining techniques, and the improvement of the devices for coupling CE with CL detection, it is hoped that both techniques may be incorporated in the future as suitable methodology in routine laboratories, being complementary to classical techniques such as HPLC and offering new alternatives to the analytical chemist. 

The latest advancement in femtosecond (fs)-based micromachining technology has opened a new window of opportunity for fabrication of microdevices. Direct exposure of most solid materials (including fused silica glass) to high power fs laser pulses may lead to the ablation of a thin layer of materials at the laser focal point13. Due to the multiphoton nature of the laser-material interaction, the ablation process can be conducted on the material surface as well as within its... 

In parallel with improvements in chemical sensor performance, analytical science has also seen tremendous advances in the development of compact, portable analytical instruments. For example, lab-on-a-chip (LOAC) devices enable complex bench processes (sampling, reagent addition, temperature control, analysis of reaction products) to be incorporated into a compact, device format that can provide reliable analytical information within a controlled internal environment. LOAC devices typically incorporate pumps, valves, micromachined flow manifolds, reagents, sampling system, electronics and data processing, and communications. Clearly, they are much more complex than the simple chemo-sensor described above. In fact, chemosensors can be incorporated into LOAC devices as a selective sensor, which enables the sensor to be contained within the protective internal environment. Figure 5... 

The design of mini and micro systems calls for a multidisciplinary approach involving engineering, materials science, electronics and chemistry. With the advances in integrated circuit technology and micromachining of liquid filters,... 

This chapter is not intended to be a comprehensive review of literature. For example, micromachining based on porous-type anodization of the entire A1 substrate, subsequent lithography, and selective and anisotropic etching of unprotected regions of porous AI2O3 will not be covered in this chapter. This technique has been described in other publications.6-11 This chapter represents our attempt to draw attention to the unique capability of localized porous-type anodization of A1 for the fabrication of A1 or AI2O3 microstructures and to demonstrate some examples of fabricated or feasible devices. In addition, this chapter is intended to summarize advances made in this area from the 1970s to the present time. 

Ziaie, B., Baldi, A., Lei, M.. Gu, Y.D., and Siegel, R.A. (2004) Hard and soft micromachining for BioMEMS review of techniques and examples of applications in microfluidics and drug delivery. Advanced Drug Delivery Reviews, 56 (2), 145-172. 

Neul, A low cost angular rate sensor for automotive applications in surface micromachining technology, Proc. Advanced Microsystems for Automotive Applications 99 (eds D. E. Ricken, W. Gessner), Springer, Berlin, Germany, 1999, 239-250 ... 

A more advanced process that can include capacitive sensors, electrostatic actuators, and piezoresistive sensors on the same chip is also made possible by bulk micromachining. 

Micromachining Technology, in Advanced Microsystems for Automotive Applications 99, Detlef E. Ricken, Wolfgang Gessner, Berlin, Germany, 1999. 

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