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Micromachining glass

Name three kinds of glass substrates commonly used to fabricate microchips. Describe the process of photolithography used in glass micromachining. (5 marks)... [Pg.393]

What is the difference between a photomask and an etch mask in glass micromachining (2 marks)... [Pg.393]

So far only thermal effects and chemical etching have been investigated systematically, mostly for glass machined with an active cathode. The following discussion will therefore concentrate on glass micromachining. [Pg.97]

According to criterion (5.6), glass micromachining requires only low heat power (below 1 W), and approximation (5.16) can be used to describe the machining speed. Written in the form of non-normalised variables ... [Pg.105]

A. van den Berg, Silicon and glass micromachining for jlTAS, in Lah-on-a-Chip, Miniaturized Systems for (Bio)chemical Analysis and Synthesis (eds Oosterbroek, A. van den Berg), Elsevier, Amsterdam, 2003,... [Pg.538]

Gardieneers JG, Oosterbroek RE, Van der Berg A (2003) Silicon and glass micromachining for p-TAS. In Oosterbroek RE, Van dta- Berg A (eds) Lab-on-a-chip miniaturized systems for (bio) Chemical analysis and synthesis. Elsevier, Amsterdam, pp 37-64... [Pg.645]

Petersen D, Mogensen KB, Klank H (2004) Glass micromachining. In Geschke O, Klank H, Telleman P (eds) Microsystem engineering of lab-on-a-chip devices. Wiley-VCH, Weinheim, pp 161-168... [Pg.646]

See other pages where Micromachining glass is mentioned: [Pg.394]    [Pg.409]    [Pg.105]    [Pg.115]    [Pg.119]    [Pg.142]    [Pg.159]    [Pg.165]    [Pg.355]    [Pg.70]    [Pg.1588]    [Pg.1744]    [Pg.51]    [Pg.976]    [Pg.1079]   


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