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Silicon direct bonding

Silicon direct bonding (silicon fusion bonding). [Pg.38]

Silicon Direct Bonding (Silicon Fusion Bonding)... [Pg.38]

Shimbo M, Furukawa K, Fukuda K, Tanzawa K. Silicon-to-silicon direct bonding method. J Appl Phys 1986 60 2987-9. [Pg.261]

C. Harendt, B. Hofflinger, H.G. Graf, E. Penteker, Silicon direct bonding for sensor applications characterisation of the bond quality, Sens. Actuators 1991, A25-27, 87-92. [Pg.92]

TABLE 23. 29Si chemical shifts for some transition metal complexes with silicon directly bonded to the metal... [Pg.541]

Figure 3.21 Low temperature silicon direct bonded microfiuidic sensor element. Source With courtesy of the CiS Forschungsinstitut fur Mikrosensorik und Photovoltaik GmbH, Erfurt, Germany. Figure 3.21 Low temperature silicon direct bonded microfiuidic sensor element. Source With courtesy of the CiS Forschungsinstitut fur Mikrosensorik und Photovoltaik GmbH, Erfurt, Germany.
See other pages where Silicon direct bonding is mentioned: [Pg.98]    [Pg.39]    [Pg.444]    [Pg.811]    [Pg.825]    [Pg.884]    [Pg.35]    [Pg.3477]    [Pg.481]    [Pg.20]    [Pg.2180]    [Pg.2180]    [Pg.73]    [Pg.74]   
See also in sourсe #XX -- [ Pg.444 ]

See also in sourсe #XX -- [ Pg.74 , Pg.75 ]



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Direct bond

Direct bonding

Directed bonds

Siloxane Oligomers with Functional Groups Directly Bonded to the Terminal Silicon Atoms (Si—X)

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