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Cutting edge silicon-based micromachined sensors

Cutting-edge Silicon-based Micromachined Sensors for Next Generation Household Appliances... [Pg.198]

See also in sourсe #XX -- [ Pg.198 , Pg.199 , Pg.200 , Pg.201 , Pg.202 , Pg.203 , Pg.204 , Pg.205 , Pg.206 , Pg.207 , Pg.208 , Pg.209 ]

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Micromachined

Micromachines

Micromachining

Sensors based

Silicon micromachining

Silicon-based

Silicone-based sensors

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