Microfabricated

Figure Bl.19.17. Conunercially produced, microfabricated, V-shaped Si3N4 cantilever and tip for AFM (Taken from [215].)...

Haab B B and Mathies R A 1999 Single-molecule detection of DNA separations in microfabricated capillary electrophoresis chips employing focused molecular streams Ana/. Chem. 71 5137-45... 

Microfabrication techniques used for the production of MEMS (micro electro-mechanical systems) have been successfully used to produce highly efficient micro fluidic systems. 

Figure 3 shows an SEM micrograph of a typical SFM cantilever. The cantilevers are 100—200 pm long and 0.6 pm thick, microfabricated from low-stress Si3N4 with an integrated, pyramidal tip. Despite a minimal tip radius of about 400 A,... 

Rai-Choundhury, P. ed.. Handbook of Microlithography, Micromachining and Microfabrication. Vol. 1 microlithography, SPIE Optical Engineering Press, Washington,... 

D. W. L. Tolfree. Microfabrication using synchrotron radiation. Rep Prog Phys (57 313-351, 1998. 

J. L. Wilbur, A. Kumar, E. Kim, G. M. Whitesides. Microfabrication by microcontact printing of self-assembled monolayers. Adv Mater (5 600-604, 1994. 

Microfabrication technology has made a considerable impact on the miniaturization of electrochemical sensors and systems. Such technology allows replacement of traditional bulky electrodes and beaker-type cells with mass-producible, easy-to-use sensor strips. These strips can be considered as disposable electrochemical cells onto which the sample droplet is placed. The development of microfabricated electrochemical systems has the potential to revolutionize the field of electroanaly-tical chemistry. 

Chaudhari AM, Woudenberg TM, Albin M, Goodson KE (1998) Transient liquid crystal thermometry of microfabricated PCR vessel arrays. J Microelectromech Sys 7 345-355 Cheng P, Wu WY (2006) Mesoscale and microscale phase heat transfer. In Greene G, Cho Y, Hartnett J, Bar-Cohen A (eds) Advances in heat transfer, vol 39. Elsevier, Amsterdam Choi SB, Barron RF, Warrington RQ (1991) Fluid flow and heat transfer in micro- tubes. ASME DSC 40 89-93... 

Ross D, Gaitan M, Locascio LE (2001) Temperature measurement in microfluidic systems using a temperature-dependent fluorescent dye. Anal Chem 73 4117-4123 Sammarco TS, Bums MA (1999) ThermocapiUary pumping of discrete drops in microfabricated analysis devices. AlChE J 45 350-366... 

Li, Y. and Bhushan, B., Wear and Friction Studies of Contact Recording Interface with Microfabricated Heads," Wear, Vol. 202,1996, pp. 60-67. 

Photolithography and microfabrication can be combined to manufacture well-defined, micro-... 

Boateng S, Lateef SS, Crot C, Motlagh D, Desai T, Samarel AM, Russell B, and Hanley L. Peptides bound to silicone membranes and 3D microfabrication for cardiac cell culture. Adv Mater, 2002, 14, 461 63. 

Of course, the benefits of microfabricated and stractured reactors are also applicable to even larger scale processes. For example, Evonik s development of a production-scale microstructured reactor for vinyl acetate manufacture (150000t per annum) claims depreciation and operating cost savings of 3 million per year [25]. 

FIG. 16 SEM micrograph of a microfabricated Si3N4 tip coated with E. coli D21 cells. (Reprinted with permission from Ref. 74. Copyright 1999 American Chemical Society.)... 

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