Micro-electro-mechanical system

A. B. Fra2ier, M. R. Khan, and M. G. AHen, Symposium Proceedings of the Materials Kesearch Society (S mart Materials Fabrication andMaterialsfor Micro-Electro-Mechanical Systems), San Francisco, Calif., Apr. 28—30,1992, 276, 295—301 (1992). 

MICRO ELECTRO-MECHANICAL SYSTEMS FOR THE DETECTION OF BIOANALYTES USING ELECTROCHEMILUMINESCENCE... 

Microfabrication techniques used for the production of MEMS (micro electro-mechanical systems) have been successfully used to produce highly efficient micro fluidic systems. 

Ho C-M, Tai Y-C (1998) Micro-electro-mechanical systems (MEMS) and fluid flows. Ann Rev Fluid Mech 30 579-612... 

E. Gardeniers, F. C. M. van de Pol, in Proceedings of the IEEE Micro Electro Mechanical Systems Workshop Nara, Japan, 1991, pp. 221-226. 

Yao, S.C., Tang, X., Hsieh, C.C., Alyousef, Y, Vladimer, M., Redder, G.K., Amon, C.H., 2006. Micro-electro-mechanical systems (MEMS)-based micro-scale direct methanol fuel cell development. Energy 31 636-649. 

Until now, all in the literature proposed LAPS devices are complete autarkic measurement systems. Further applications can be found by the integration of LAPS devices into existing analytic fields. This requires the development of inexpensive integrated electronic units to operate the LAPS and to provide a standardised communication with higher process levels. The LAPS devices need to be easy in use to allow the operation in commercial environments. Due to the simple structure of the LAPS, the integration into micro-electro-mechanical systems (MEMS), lab-on-chip and micro-total analysis systems (p-TAS) might be of special interest in the near future. 

Without being itself a screening device, the reactor of Jensen et al. [6, 42, 43] also has to be mentioned because they opened up a completely new field in catalysis by combining MEMS (micro-electro-mechanical systems) technology with a chip-based catalytic reactor (Fig. 4.10). A mixing-tee was equipped with heaters and temperature and flow sensors, thus giving on-stream information about the reaction conditions. 

X.Q. Wang, Y.C. Tai, Normally closed in-channel micro check valve, Proceedings of the 13th IEEE International conference on micro electro mechanical systems (MEMS 2000), Miyazaki, Japan, 68 (2000). 

Micro Electro Mechanical Systems (MEMS 2001), Interlaken, Switzerland, 539... 

J. Xie, J. Shih, Y. Miao, T.D. Lee, Y.-C. Tai, Complete gradient-LC- ESI system on a chip for protein analysis. Proceedings of the 18th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2005). Miami Beach, Florida, Jan 30-Feb 2, 778 (2005). 

Molten carbonate fuel cells Micro-electro-mechanical systems Microreactor Technology for Hydrogen and Electricity Micro-structured membranes for CO Clean-up Membrane reactor... 

Micro flow control devices open new possibilities for the miniaturization of conventional chemical and biochemical analysis systems. The micro total analysis system (pTAS) including microfabricated detectors (e.g. silicon based chemical sensors, optical sensors), micro flow control devices and control/detec-tion circuits is a practical micro electro mechanical system (MEMS). pTAS realize very small necessary sample volume, fast response and the reduction of reagents which is very useful in chemical and medical analysis. Two approaches of monolithic and hybrid integration of these devices have been studied. Monolithic and hybrid types of flow injection analysis (FIA) systems were already demonstrated [4, 5]. The combination of the partly integrated components and discrete components is useful in many cases [6]. To fabricate such systems, bonding and assembling methods play very important roles [7]. 

Ohori T, Shoji S, Miura K, Yotsumoto T (1997) Proc Micro Electro Mechanical Systems Workshop, to be presented. 

Ehrfeld W, Abraham M, Ehrfeld U, Lacher M, Lehr H (1994) Proc 7th IEEE Inti Workshop Micro Electro Mechanical Systems, Japan... 

The application of actuators in micro-electro-mechanical systems (MEMS) requires the miniaturization (100 to 500 microns) of the permanent-magnet components while preserving as much as possible their bulk magnetic properties. In many instances, a severe degradation in coercivity occurs when the magnet size is reduced at such small dimensions. This is par-... 

Spin coated copolymer films show a decrease in remanent polarisation if the film thickness [504, 505] decreases. The application of piezoelectric materials in micro-electro-mechanical systems (MEMS) or sensors makes it often necessary to decrease the lateral dimensions of the elements. Recently, Alexe et al. [506, 507] fabricated freestanding microcells with lateral dimensions down to 100 nm and heights of 110 nm from a ferroelectric PZT by direct... 

Ganguly U, Krusius IP. Novel compensation chemical metal polishing for low dishing and high global planarity for ultra-planar die applications in micro-optics and micro-electro-mechanical systems. Thin Solid Films 2004 460 306-314. 

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