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Microfabricated thin-film microelectrode technologies

Table 1 Comparison of several microfabricated thin-film microelectrode technologies... [Pg.173]

Low-aspect-ratio (ratio of the height of the microelectrode divided by its lateral dimension is larger than 0.2) microelectrode arrays are fabricated using conventional silicon-based microfabrication technologies, such as hthographic techniques to yield arrays of thin films of metallic or carbon electrodes on a silicon substrate. These arrays often have limited stability and life times as a result of defects in the metal layer poor resistance to corrosion is... [Pg.403]

See other pages where Microfabricated thin-film microelectrode technologies is mentioned: [Pg.10]    [Pg.304]    [Pg.136]    [Pg.281]    [Pg.281]    [Pg.50]    [Pg.128]    [Pg.105]    [Pg.105]    [Pg.163]    [Pg.1178]   
See also in sourсe #XX -- [ Pg.173 ]



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Microelectrode

Microelectrodes

Microfabricated

Microfabricated microelectrodes

Microfabricated thin-film microelectrode

Microfabrication

Microfabrication technologies

Thin-film technologies

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