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Examples of CMP Applications for Microfabrication

CMP has been used for the mass production of microsystems for a number of years now. Among many representative applications, a limited number of examples in which CMP processes were employed have been selected here to illustrate the use of this technology and related issues. These examples cover [Pg.412]

Material Pads Reference Slurries Reference Remarks [Pg.413]

Si oxides (Si02, ICIOOO Series, Rohm Klebosol 1501-50, Rohm Haas  [Pg.413]

PETEOS, Politex Prima Haas Klebosol 1508-50  [Pg.413]

SiN Suba 500, Politex Rohm Nalco 2360 Rohm Haas  [Pg.413]

See other pages where Examples of CMP Applications for Microfabrication is mentioned: [Pg.412]    [Pg.417]    [Pg.419]    [Pg.421]    [Pg.423]    [Pg.425]    [Pg.412]    [Pg.417]    [Pg.419]    [Pg.421]    [Pg.423]    [Pg.425]    [Pg.402]    [Pg.425]   


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Example applications

Examples of applications

For example

Microfabricated

Microfabrication

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