Microfabrication with glass

Another interesting result is that clamping with 50 xm thin PDMS gaskets did even seal systems where the glass chip had 300 nm thick electrodes on the surface. Planar electrodes microfabricated on glass chips are widely used in microfluidic systems, e. g., for electrochemical detection, ECL (electrochemoluminescence) detection, dielectrophoresis, AC electroosmotic flow and electrohydrody-... 

Microsystems can be built on various substrates with a range of materials crystalline silicon, amorphous silicon, glass, quartz, metals, and organic polymers. Single-crystal silicon substrates have been used in most areas of microfabrication for a range of excellent reasons ... 

Only very few studies with alternative materials and fabrication methods have been published. Ekstrom et al. [35] demonstrated the feasibility of structuring inexpensive polymeric materials by means of a microfabricated master for the production of microchannel systems. The structured polymer film was mechanically clamped between two glass plates to form a closed channel system. Recently, a similar route for the fabrication of microchannel chips that relies on casting of an elastomeric polymer material against a microfabricated master has been presented by Effenhauser et al. [36] (see Sect. 3.4). 

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