Microelectromechanical systems microfabrication

An alternate approach to traditional batteries consists of using MEMS (microelectromechanical systems), microfabrication, and nanotechnologies to implement a variety of energy conversion microsystems. These power MEMS could provide electrical power, propulsion, or cooling based on traditional operating principles or on novel prin-... 

Yuzhakov et al. [93] describe the production of an intracutaneous microneedle array and provide an account of its use (microfabrication technology). Various embodiments of this invention can include a microneedle array as part of a closed loop system smart patch to control drug delivery based on feedback information from analysis of body fluids. Dual purpose hollow microneedle systems for transdermal delivery and extraction which can be coupled with electrotransport methods are also described by Trautman et al. [91] and Allen et al. [100]. These mechanical microdevices which interface with electronics in order to achieve a programmed or controlled drug release are referred to as microelectromechanical systems (MEMS) devices. 

BeUoy, E., Pawlowski, A. G, Sayah, A., and Gijs, M. A. M., Microfabrication of high-aspect ratio and complex monohthic structures in glass. Journal of Microelectromechanical Systems 11, 521-527, 2002. 

Microfabrication using sacrificial layers is well developed in the field of microelectromechanical systems. Reports include the fabrication of micro- and nanomechanical components, electroos-motic micropumps in silicon and glass substrates, and nano- ormicrochannels with potential applications in biology. Unlike bonding protocols, in which a cover plate is affixed to a patterned substrate to seal microchanneis, sacrificial layer methods can obviate the bonding step, making this approach very attractive. ... 

C. D. Meinhart and H. Zhang The flow structure inside a microfabricated inkjet printhead. Journal Microelectromechanical Systems, 9(1), 67-75 (2000). 

Tong, H.D., Berenschot, J.WIE., de Boer, M.J. et al. (2003) Microfabrication of palladium-silver alloy membranes for hydrogen separation. Journal of Microelectromechanical Systems, 12,622-629. 

Kamik, S. V., HataUs, M. K., Kothare, M. V. (2003). Towards a palladium micro-membrane for the water gas shift reaction microfabrication approach and hydrogen purification results. Journal of Microelectromechanical Systems, 12, 93—100. 

MEMS (microelectromechanical systems) are devices made by the integration of mechanical elements, sensors, actuators, and electronics on a common Si substrate through microfabrication technology [1]. MEMS find applications in areas such as sensors, actuators, power-producing devices, telecommunications, chemical reactors, biomedical devices, etc. [2,3]. In MEMS components, the electrostatic and other surface forces become predominant when compared with inertial and gravitational forces because of the large ratios of surface area to volume, and hence the performance of MEMS components is limited by the nature of the surface. Therefore, contact-related... 

Polymer microfabrication has become a popular alternative to the well-established silicon and glass-based microelectromechanical system (MEMS) fabrication tech-... 

Microelectromechanical systems (MEMs) are microfabricated devices that integrate mechanical elements, sensors, actuators, and electronics on a common silicon substrate. MEMS technology has a broad range of biological, medicinal, and industrial applications. Like all mechanical equipment, MEMs devices are subject to wear and tear over extended periods. 

Metz S, Bertsch A, Renaud P (2005) Partial release and detachment of Microfabricated Metal and Polymer Structures by Anodic Metal Dissolution. Journal of Microelectromechanical Systems 14 383-391. 

Simultaneous recordings of exocytotic events from single cells or cell clusters can be accomplished by microfabricated MEAs with individually addressable microelectrodes, which can be fabricated by the most widely used microelectromechanical system (MEMS) techniques, involving the use of... 

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