Microfabrication glass

Multiphase packed-bed or trickle-bed microreactor [29, 30] Standard porous catalysts are incorporated in silicon-glass microfabricated reactors consisting of a microfluidic distribution manifold, a single micro-channel reactor or a microchannel array and a 25-pm microfllter. The fluid streams come into contact via a series of interleaved high aspect ratio inlet chaimels. Perpendicular to these chaimels, a 400-pm wide channel is used to deliver catalysts as a slurry to the reaction chaimel and contains two ports to allow cross-flow of the slurry. High maldistribution, pressure drop and large heat losses may occur... 

Having developed microcoils on a substrate, it is only one step further to integrate more than one microfluidic channel in the substrate on which the planar coil is placed, for example in order to study reaction kinetics. Developments in silicon and glass microfabrication technology have increased rapidly and integration of different chemical unit processes can be made easier by the use of modern microfabrication. 

Microfabrication is achieved by photolithography and isotropic etching of glass using HF [4—13]. Thermal bonding serves for interconnection. Holes are drilled in the top plate for connection to the fluidic peripherals. 

Microfabrication was made by wet-chemical glass etching [20]. Sealing was achieved by thermal bonding. 

CE chips are mainly obtained using various glass substrates, from inexpensive soda-lime glass to high-quality quartz.Various polymer materials are also used. The choice of a particular material depends on its surface properties, ease of fabrication, which can be quite different according to the material origin, disposability, and price. Microfabrication processes were recently reviewed and the reader is thus referred to dedicated literature for additional useful information on microfluidic device fabrication. ... 

Microfabrication is effected by etching a wafer from both sides which contains through-holes for the fluid connectors [42], Two transparent cover plates close the open structures and also have through-holes. A glass capillary was attached to the three-plate chip. The holes in the cover plate were made by sandblasting. 

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