Metrology

In-line metrology is a process control method suitable for regulating dielectric CMP. There are two major methodologies in use for in-line metrology wet and dry. Wet measurements involve immersing each wafer in DI water immediately after polishing it and measuring the amount 

The process variations that have been intrinsic to CMP since the beginning of its use in semiconductor manufacturing have led to endpoint detection (EPD) being viewed as the holy grail of CMP. 

Numerous approaches have been proposed for use in CMP for in situ EPD. They include optical, electrical, and acoustic sensing. Given the benefits of EPD, it is no surprise that many of these methods have been awarded patents. Some of these methods, most notably current sensing, have been developed to become commercially viable products while others remain laboratory curiosities. For a review of in situ endpoint detection methods up to early 1998, see the work of Bibby and Holland [68]. 

Sensors are used to measure operating parameters, the most important of which are  

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Non Invasive Optical and Digital Metrology of Rough Surfaces. 

Sirohi, Speckle Metrology ,Marcel Dekker, Inc., New York (1993). 

In doing this the problems may arise if one person alone manages several processes, i.e. if his activity embraces a number of functions (as may be especially typical for NDT). It is better if each process is assigned to a specialist responsible for it. For example, persons responsible for the technical state of NDT equipment, for metrological confirmation of NDT facilities, for standards on testing, for NDT results registration, etc. 

Metrological attestation as the procedure that ensures reproducibility and comparability of the results of measurements is specified in GOST 8.010-90 State System of Measurements. Procedures of Measurements Implementation didn t find wide use in NDT. In airspace industry, railway and naval transport the requirements of approval of test procedures is in force more than 20 years. In chemical and oil-chemical sectors the similar requirements were less explicit. In some industries, for example in building GOST 8.010-90 was not put into account. 

Metrological attestation of the procedure of testing is realized by the developing organization with the aid of experts - specialists in NDT. Metrological attestation of the procedure of testing is performed after accumulation of statistical data. 

It may be realised by means of definite complex of intereonneeted and interrelated common rules and norms direeted to the assurance of traceability and uniformity of measuring equipment, NDT equipment including. In another words NDT equipment must be metrologically supported. 

The main tasks of metrological maintenance of NDT equipment and standard blocks on compliance with standard of Belarus CTB 8004-93 are ... 

Checking is performed in accredited laboratories on procedures developed in compliance with stated requirements and approved in the process of testing implementation on CTB 8001-93 or metrological attestation on CTB 8004-93. 

Checking of NDT devices is mandatory and is strictly regulated. Checking is performed and supervised by National metrological service. The term calibration is rather new in our practice. The works on calibration of NDT equipment are presented in the block-scheme 2. 

The service for calibration is not established yet in Belarus. Calibration is voluntary and is realised either by metrological service of the plant or by any authorised organisation. 

CTB 8006-93 State metrological surveillance and inspection of measuring procedures... 

The work on standardisation in Ukraine is led by the State Committee of Ukraine on Standardisation, Metrology and Certification (Gosstandardt), All the USSR standards (GOSTs) are valid in Ukraine, and several dozens of them were elaborated in the NDT field. 

International Vocabulary ofiBasic and GeneralTerms in Metrology, 2nd ed.. Organisation Internationale de Metrologie Legale, Paris, 1993. 

Metrologia International Committee of Weights and Measures (CIPM) Pavilion de Breteuil Parc de St. Cloud, Prance Includes articles on scientific metrology worldwide, improvements in measuring techniques and standards, definitions of units, and the activities of various bodies created by the International Metric Convention. 

Metrology and Fundamental Constants A.E. Milone and P. Giacomo, eds. North Holland Pubhshing Co. Amsterdam, the Nethedands, 1980 The proceedings of an international course that was organi2ed to review metrology comprehensively and to illustrate links between metrology and the fundamental constants. Status of research is presented and future work and priorities are outlined. 

R. O. Voth, J. D. Siegworth, J. F. Welch and M. J. Hi2a, Process Design Criteria, Data and Metrology Related to Slush Hydrogen Technology, NASA Tech. Memo 1006, NASA Langley Res. Cntr.,Mar., 1987. 

Process measurements encompass the apphcation of the principles of metrology to the process in question. The objective is to obtain values for the current conditions within the process and make this information available in a form usable by either the control system, process operators, or any other entity that needs to know The term measured variable or process variable designates the process condition that is being determined. 

Qualitative analysis methods should have well-grounded and generally adopted quantitative reliability estimations. At first the problem was formulated by N.P. Komar in 1955. Its actuality increased when test methods and identification software systems (ISS) entered the market. Metrological aspects evolution for qualitative analysis is possible only within the scope of the uncertainty theory. To estimate the result reliability while detecting a substance X it is necessary to calculate both constituents of uncertainty the probability of misidentifications and the probability of unrevealing for an actual X. There are two mutual complementary approaches to evaluate uncertainties in qualitative analysis, just as in quantitative analysis ... 

Svoboda sq. 4, Kharkiv, 61077, Department of Chemical Metrology, Ukraine, E-mail Alexander.P.Boichenko univer. kharkov. ua... 

Scientific and Expert Pharmacopoeial Centre, Astronomicheskaya str, 33, 61085 Kharkov, Ukraine. E-mail kulikov phukr.kharkov.ua Department of Chemical Metrology, Kharkov V.N. Karazin National University, Svoboda square, 4, 61077 Kharkov, Ukraine... 

The evaluation of metrological characteristics of the technique, perfonued with minerals of different composition, showed that technique developed for reliability and precision satisfies the requirements offered for quantitative determinations, category II. The detection limits are acceptable for solving the problems posed and amount to 0.1 - 0.4 wt. %, depending on the element analyzed. 

The well-known reaction of Ni(II) with dimethylglyoxime (H Dm) in alkaline medium under the influence of such oxidants as persulphate and iodine is widely used for the photometric determination of nickel. The red product (RP) of this reaction is used for this purpose. However, the nature of this red compound has not been defined yet. Using of peroxyacids makes it possible to obtain additional data concerning the conditions and mechanism of generation of RP as well as to improve the metrological pai ameters of the method. 

It is shown that metrological characteristics of the suggested methods are commensurable. Dissolved gas is pushed away by front of crystallization, takes the air and does not influence on the obtained results during the analysis of the water. Process is carried out at the lower temperature (-15°C), expelling chemical transformations of ingredients. The procedure was tested on different samples of natural and drinking water of the Kharkov region. 

The complex of the following destmctive and nondestmctive analytical methods was used for studying the composition of sponges inductively coupled plasma mass-spectrometry (ICP-MS), X-ray fluorescence (XRF), electron probe microanalysis (EPMA), and atomic absorption spectrometry (AAS). Techniques of sample preparation were developed for each method and their metrological characteristics were defined. Relative standard deviations for all the elements did not exceed 0.25 within detection limit. The accuracy of techniques elaborated was checked with the method of additions and control methods of analysis. 

The methodical elaboration is included for estimation of random and systematic errors by using of single factor dispersion analysis. For this aim the set of reference samples is used. X-ray analyses of reference samples are performed with followed calculation of mass parts of components and comparison of results with real chemical compositions. Metrological characteristics of x-ray fluorescence silicate analysis are established both for a-correction method and simplified fundamental parameter method. It is established, that systematic error of simplified FPM is less than a-correction method, if the correction of zero approximation for simplified FPM is used by preliminary established correlation between theoretical and experimental set data. 

The investigation leads to the elaboration of solid-phase spectrophotometric and test methods of different cationic surfactants determination in water. The detection limits of cationic surfactants with hydrocarbon radical length is 0.7 mg/dm, is 0.2 mg/dm, C is 0.009 mg/dm and is 0.003 mg/dm by using a 100 cm sample. Metrological performance of method was examined on the natural samples. Proposed method is highly sensitive, simple, rapid and guarantees ecological purity of analysis. 

The metrology characteristics of designed techniques of elements determination meet the requirements shown to test - methods of the analysis. The time of determination makes 15-20 minutes. 

Application of IP and NCS in conjunction with specification tolerance limits enables to substantiate acceptance criteria for linear regression metrological characteristics (residual standard deviation, correlation coefficient, y-intercept), accuracy and repeatability. Acceptance criteria for impurity influence (in spectrophotometric assay), solution stability and intermediate precision are substantiated as well. 

The principle of insignificancy , enabling use of the given principle for any level of probability is substantiated. The systematic application of the given principle results in developing metrological criteria for pharmaceutical reference substance, analytical validation, evaluation of results of interlaboratory testing and suitability of the analytical equipment for the phamiaceutical analysis. 

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