Optical metrology

The 1S-2S transition frequency is so well known [18] that further precision at this time will not yield a better value for the Lamb shift and nuclear shape corrections. Nevertheless, further precision is desirable both for advancing the frontier of optical metrology, and because the transition has potential applications for... 

Schmitt R, Pavim A (2009) Flexible optical metrology strategies for the control and quality assurance of small series production. Proc SPIE 7389(Optical measurement systems for industrial inspection VI) 738902. doi 10.1117/12.827589 Schmitt R, Mallmann G, Peterka P (2011) Development of a FD-OCT for the inline process metrology in laser structuring systems. Proc SPIE 8082(Optical measurement systems for industrial inspection Vn) 808228. doi 10.1117/12.889365... 

R. Loser, S. Kyle, Alignment and field check procedures for the Leica Laser Tracker LTD 500, Boeing Large Scale Optical Metrology Seminar (1999). 

Cervenkova L, Skovajsa M (2013) Doosan skoda power modernization and retrofitting of turbine components. GOM conference—optical metrology 2013, 9-12 Sept 2013, Braunschweig, Germany... 

Handbook of 3D Machine Vision Optical Metrology and Imping... 

Non Invasive Optical and Digital Metrology of Rough Surfaces. 

The number of measurable layers of a stack is limited only by the optical contrast between the different layers. In practice stacks of ten layers and more can be analyzed by ellipsometry. Further advantages of ellipsometry compared with other metrological methods are the non-invasive and non-destructive character of the optical method, the low energy entry into the sample, the direct measurement of the dielectric function of materials, and the possibility of making the measurement in any kind of optical transparent environment. 

A. A. Miehelson (Chicago) optical precision instruments and the spectroscopic and metrological investigations carried out with their aid. 

Adaptive optics. atmospheric turbulence, residuals Metrology Wavefront sensor(s)... 

Abstract The principles of coatings to either enhance reflectivity of mirrors or to enhance transmission of glass optics are described. Then the ion assisted deposition and ion beam sputtering techniques are addressed. Performances of these technique-sand their limitations are illustrated with the characteristics of the VIRGO mirrors coated at LMA. The importance of metrology is emphasized. 

Figure 21 shows the large coater for the VIRGO optics at LMA (Lyon). The technology is DIBS. Its size is 2x2.2x2.2 m. The inner pressure is 2 x 10 mBar. The coater is located in a 150 m class 1 room whith metrology and control. In a class 1 room, tolerance is <10 particles of 0.1 jum and <1 particle of 0.5 /xm xfoot xs l. 

Albert Michelson developed the interferometer about 1880 and conducted the Michelson-Morley experiment in 1887, in which it was found that the speed of light is independent of the motion of the source and the observer, this crucial experiment led Einstein to the theory of relativity. Michelson also used the interferometer to create the predecessor of today s length standard based on the wavelength of light. He received the Nobel Prize in 1907 for precision optical instruments and the spectroscopic and metrological investigations carried out with their aid. ... 

Industrial Metrology and Optics, IIP, Royal Institute of Technology, 11422 Stockholm, Sweden... 

Centre for Optical and Environmental Metrology, National Physical Laboratory, Teddington, Middlesex, TW11 OLW, UK... 

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