Metrology atomic force microscopy

Abdelhady HG, Allen S, Ebbens SJ, Madden C, Patel N, Roberts CJ, Zhang JX (2005) Towards nanoscale metrology for biomolecular imaging by atomic force microscopy. Nanotechnology 16 966-973... 

Magonov, S., Atomic force microscopy at the 100-nm scale practical, theoretical, and metrological outlook, Proc. SPIE 6002, 60 020S, 2005. 

T.G. Strange, R. Mathews, D.F. Evans, and W.A. Hendrickson, Scanning tunneling microscopy and atomic force microscopy characterization of polystyrene spin coated onto silicon surfaces, Langmuir 8, 920 (1992) U. Okoroanyanwu, J. Cobb, P. Dentinger, P, C. Henderson, V. Rao, and C. Pike, Defects and metrology of ultrathin resist films, Proc. SPIE 3998, 515 (2000). 

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