Fluid Metrology

Fluid metrology Fluid quantification Measurement standards Weights and measures... 

From the calibration point of view, manometers can be divided into two groups. The first, fluid manometers, are fundamental instruments, where the indication of the measured quantity is based on a simple physical factor the hydrostatic pressure of a fluid column. In principle, such instruments do not require calibration. In practice they do, due to contamination of the manometer itself or the manometer fluid and different modifications from the basic principle, like the tilting of the manometer tube, which cause errors in the measurement result. The stability of high-quality fluid manometers is very good, and they tend to maintain their metrological properties for a long period. 

The simplest calibration procedure for a gas flow-measuring device is to connect it in series with a reference meter and allow the same flow to pass th tough both instruments. This requires a reference instrument of better metrological quality than the calibrated instrument. One fact to consider when applying this method is that the mass flow rate in the system containing both instruments is constant (assuming no leakage), but the volume flow rate is not. The volume flow rate depends on the fluid density and the density depends on the pressure and the temperature. The correct way to calibrate is to compare either the measured mass... 

Fig. 1 Traceability system for the determination of the most important diagnostic markers in human body fluids in Germany. The clinical reference laboratories at the intermediate level providing calibration means to the routine medical laboratories are accredited as calibration laboratories in the framework of the German Calibration Service (DKD) and are firmly linked to the national metrology institute, PTB, by comparison measurements carried out on actual laboratory samples. Accreditation is in part required by the Federal Physicians Council (BAK) or is voluntary. The traceability system is still under development...

As discussed in earlier sections, CMP process involves the surfaces to be polished, pads,slurries which are composed of chemicals, abrasives, and fluids, slurry dispensing tools, CMP tools, cleaning tools, and finally metrology tools to measure the thickness and quality of the processed (or unprocessed) surfaces of films. Figure 1.1 shows a diagram of CMP process integration. Final manufacturability of a given CMP process will be determined by the need, performance, and cost per die. 

Trusler, ).P.M. (1991) Physical Acoustics and Metrology of Fluids. Institute of Physics, Bristol. 

The excess given by Eq. (10) can be measured directly for closed fluid phases. As the various excesses can be converted to each other by the corresponding factors v , quantities that are not open to measurement can be calculated. Thus, Eq. (10) has significance in metrology. 

Laser Metrology in Fluid Mechanics Granulometry, Temperature and Concentration Measurements... 

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