Microsystem

M. S. Khan, Proceedings of the Society of Photo-Optical Instrumentation Engineers (Metalj Nonmetal Microsystems Physics, Technology, and Applications Proceedings of the Workshop, Polanica Zdroj, Poland, Sept. 11—14, 1995, 2780, 56—59 (1996). 

The reduction of dimensions also reduces volumes which are accessible to the detector. Thus, detection principles related to geometric dimensions of the detector cell ai e not ideally suited for coupling to microsystems, whereas surface sensitive principles, such as electrochemical methods or optical methods utilizing the evanescent field of a waveguide, or methods which can be focussed on a small amount of liquid, such as electrochemiluminescence (ECE), ai e better suited. This is why electrochemiluminescence detectors ai e combined to microsystems. Moreover ECE has found wide applications in biochemistry because of its high sensitivity, relatively simplicity and feasibility under mild conditions. 

Gas flows are encountered in many microsystems like micro-motors, micro-turbines, micro-sensors, and microfluidic systems in the presence of air or gas environment. Since the ratio of surface area to volume increases in such microsystems, surface forces become dominant over the body forces, and gas flows have great affects on the performance and reliability of many microdevices. 

Dubois, P., Rosset, S., Koster, S., Bufom, J.M., Stauffer, J., Mikhailov, S., Dadras, M., Rooij, Nico- F. de., and Shea, H., Microactuators based on ion-implanted dielectric electroactive polymer membranes (EAP), Presented at 13th International Conference on Solid-State Sensors, Actuators and Microsystems, Seoul, Korea, June 5-9, 2005, 2048. 

Some concrete conclusions on market evaluation for micro reactors are given by the PAMIR study, described above (see Section 1.8.1.2). In this context, it is worth reviewing general essays on the market evaluation of microsystems technology, since in a broader view they follow the same analysis and come to the same conclusions. 

Within the NEXUS activity, aimed at strengthening the interaction of European industry and institutes in microsystems technology, user-supplier clubs (USC) are formed as one means for joint developments (for the USC for CAD tools see [240] for the MikroWebFab see [245]). This should serve to promote the industrial uptake, by bridging the gap also to new potential users. 

Ehreeld, W, Hessel, V., Mobius, H., Richter, T., Russow, K., Potentials and realization of micro reactors, in Ehreeld, W. (Ed.), Microsystem Technology for Chemical and Biological Microreactors, DECHEMA Monographs, Vol. 132,... 

Lowe, H., Ehreeld, W, Schiewe, J., Micro-electroforming of miniaturized devices for chemical applications, in ScHULTZE, W, Osaka, T., Datta, M. (Eds.), Electrochemical Microsystem Technologies, pp. 245-268, Taylor Erands, London (2002). 

Knitter, R., Gunther, E., Odemer, C., Maciejewski, U., Ceramic microstructures and potential applications. Microsystem Technol. 2 (1996) 135-138. 

Salomon, P., User needs in design tods for microsystems and microreactors -... 

Le Floch, C., From research to industry start-up companies in microsystems, in Proceedings of the VDE World Microtechnologies Congress, MICRO.tec 2000, pp. 639-643 (25-27 September 2000), VDE Verlag, Berlin, EXPO Hannover. 

Meisel, I., Ehrhard, P., Simulation of electrically-excited flows in microchannels for mixing applications, in Proceedings of the 5th International Conference on Modeling and Simulation of Microsystems, San )uan, Puerto Rico, 22-25 April 2002, Computational Publications, Boston, pp. 62-65 (2002). 

Dietrich, T. R., Ehrfeld, W., Lacher, M., Kramer, M., Speit, B., Fabrication technologies for microsystems utilizing photoetchable glass, Micoelectron. Eng. 

C. Massin 2004, Microfabricated Planar Coils in Nuclear Magnetic Resonance, Series in Microsystems, (vol. 15), Har-tung Gorre Verlag, Constance. 

Mapping of transport parameters in complex pore spaces is of interest for many respects. Apart from classical porous materials such as rock, brick, paper and tissue, one can think of objects used in microsystem technology. Recent developments such as lab-on-a-chip devices require detailed knowledge of transport properties. More detailed information can be found in new journals such as Lab on a Chip [1] and Microfluidics and Nanofluidics [2], for example, devoted especially to this subject. Electrokinetic effects in microscopic pore spaces are discussed in Ref. [3]. 

Many traditional laboratory/off-line methods are now moving in the direction of in-process applications. Online GC had already been introduced in the 1950s. Using chip- and microsystem technology, xGC is now being introduced, which achieves analysis times of 30 seconds and is therefore suitable for quality control. SPME-p,GC is potentially useful for process analysis. 

Nassiopoulou, A. G. Zianni, X. Microelectronics, Microsystems and Nanotechnology, Proceedings of the Conference, Athens, Greece, 2000 World Sci, Singapore, 2001 pp 57-60. 

Birk, H. and Storz, R. (2001). Illuminating Device and Microscope. United States Patent, Leica Microsystems Heidelberg GmbH. 

---