Microsystem technologies

Some concrete conclusions on market evaluation for micro reactors are given by the PAMIR study, described above (see Section 1.8.1.2). In this context, it is worth reviewing general essays on the market evaluation of microsystems technology, since in a broader view they follow the same analysis and come to the same conclusions. 

Within the NEXUS activity, aimed at strengthening the interaction of European industry and institutes in microsystems technology, user-supplier clubs (USC) are formed as one means for joint developments (for the USC for CAD tools see [240] for the MikroWebFab see [245]). This should serve to promote the industrial uptake, by bridging the gap also to new potential users. 

Ehreeld, W, Hessel, V., Mobius, H., Richter, T., Russow, K., Potentials and realization of micro reactors, in Ehreeld, W. (Ed.), Microsystem Technology for Chemical and Biological Microreactors, DECHEMA Monographs, Vol. 132,... 

Lowe, H., Ehreeld, W, Schiewe, J., Micro-electroforming of miniaturized devices for chemical applications, in ScHULTZE, W, Osaka, T., Datta, M. (Eds.), Electrochemical Microsystem Technologies, pp. 245-268, Taylor Erands, London (2002). 

Mapping of transport parameters in complex pore spaces is of interest for many respects. Apart from classical porous materials such as rock, brick, paper and tissue, one can think of objects used in microsystem technology. Recent developments such as lab-on-a-chip devices require detailed knowledge of transport properties. More detailed information can be found in new journals such as Lab on a Chip [1] and Microfluidics and Nanofluidics [2], for example, devoted especially to this subject. Electrokinetic effects in microscopic pore spaces are discussed in Ref. [3]. 

Many traditional laboratory/off-line methods are now moving in the direction of in-process applications. Online GC had already been introduced in the 1950s. Using chip- and microsystem technology, xGC is now being introduced, which achieves analysis times of 30 seconds and is therefore suitable for quality control. SPME-p,GC is potentially useful for process analysis. 

Recent developments in microsystems technology have led to the widespread application of microfabrication techniques for the production of sensor platforms. These techniques have had a major impact on the development of so-called Lab-on-a-Chip devices. The major application areas for theses devices are biomedical diagnostics, industrial process monitoring, environmental monitoring, drug discovery, and defence. In the context of biomedical diagnostic applications, for example, such devices are intended to provide quantitative chemical or biochemical information on samples such as blood, sweat and saliva while using minimal sample volume. 

Roger Grace Commercialisation Issues for Microsystems, Proc. Microsystem Technologies, Diisseldorf, March 2001. 

Microsystems Technology (MST) - A Complex Game of Materials, Technologies and Design... 

The members are also informed regularly on new European and national research an development support activities in the areas of microsystem technology and nanotechnology. 

Laurell T, Nilsson J, Jensen K, Harrison DJ, Kutter JP (eds) (2004) 8th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2004). Malmo, Sweden, September 26-30 Manz A, Becker H (eds) (1998) Microsystem technology in chemistry and life sciences. Springer, Berlin Heidelberg New York Metaxas AC, Meredith RJ (1983) Industrial microwave heating. Peter Peregri-nus, London... 

G. Sberveglieri, W. Hellmich, and G. Muller. Silicon hotplates for metal oxide gas sensor elements . Microsystem Technologies 3 (1997), 183-190. 

R. Jurischka. Microhotplate-basierte Metalloxid-Gassensoren in CMOS-Technologie, Diploma thesis, Institute for Microsystem Technology, University of Freiburg, Germany (2002). 

W. Menz, J. Mohr, O. Paul, Microsystem Technology, Wiley-VCH, Weinheim, 2001. 

A. Manz, H. Becker (Eds.), Microsystem technology in chemistry and life sciences, Berlin, Springer-Verlag, (1992). 

Manz, A., Becker, H., Microsystem Technology in Chemistry and Life Science, Topics in Current Chemistry, Vol. 194, Springer-Verlag, Heidelberg, 1998. 

Schuth, F. (1995), Crystallographically Defined Pore Systems Reaction Vessels with Molecular Dimensions, Microsystem Technology for Chemical and Biological Microreactors, Max Plane Institute, Mainz, Germany. 

Keywords Neural prostheses, microsystem technology, biotechnical interface, electrical stimulation, nerve signal recording. 

Fig. 13. Different combinations for biostable insulation layers in microsystem technology...

Dario P, Cocco M, Soldani G, Valderrama E, Cabruja E, Meyer J-U, Giesler T, Beutel H, Scheithauer H, Alavi M, Burker V (1994) Technology and Fabrication of Hybrid Neural Interfaces for the Peripheral Nervous System. In Reichl H and Heuberger A. (eds) Microsystem Technology, p 417... 

In this chapter the state-of-the-art of different sensor systems with emphasis on integrated systems for microanalytical application will be given. The technology, mainly the so-called microsystem technology (MST), is able to create complex miniaturized and integrated analytical systems which have entered the field of chemical and medical research. Industrial application of such systems is rare and only marketed for physical application fields, but the impact for the future will be highlighted in the following chapter. 

Modified microelectronic technology has created integrated and miniaturized sensor arrays. Additionally, microsystem technology allows to form whole microanalytical systems with integrated fluidics. 

Ehrfeld W. Hessel V, Mobius H, Richter Th, Russow K (1996) Potentials and Realization of Micro Reactors. In Microsystem Technology for Chemical and Biological Microreactors DECHEMA monograph Vol. 132. Verlag Chemie, Weinheim, p 1... 

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