Microsystem technology elements

G. Sberveglieri, W. Hellmich, and G. Muller. Silicon hotplates for metal oxide gas sensor elements . Microsystem Technologies 3 (1997), 183-190. 

The use of microsystem technologies (MST), especially micromachining, resulted in large advances in thermal detector fabrication, and particularly bolometers and thermopiles. Their reliability and miniaturization are much improved, and power dissipation decreased. MST technologies made possible batch production of two-dimensional arrays of miniamre silicon thermal detectors with electronic addressing and a large number of elements. 

Fig. 2.4 Some spherical and aspheric discrete microlenses for optical concentrators in MWIR and LWIR range that may be fabricated by microsystem technologies, a calotte b hemisphere c hyperhemisphere d ball lens e truncated sphere f bulb g hemi-cylinder h cylinder i curvilinear cone j concave concentrator k gradient-index lens (GRIN) I complex two-element lens (sphere/GRIN). The grid corresponds to the homogeneity of refractive index, i.e., describes its gradient...

As mentioned before, most of the stmctures for infrared detection can be fabricated by microsystem technologies (MST) and the microlenses for optical concentration are not an exception, regardless of the type of the optical element in question... 

Silicon, the second most abundant element on earth, is a well-established material in microsystems technology. Its properties and technical perfection open up an almost unlimited range of applications. Silicon is the main component of most semiconductor devices, but other materials are also applied step by step in microsystems technology so as to obtain some special properties. Glass is one such material that has some special properties. 

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