Microsystems, multilayers

FIGURE 47.4 Photograph of a microsystem fabricated via the multilayered structure route (top) and on-chip HPLC separation of cytochrome c digest using a lauryl methacrylate-based monolithic colnmn (bottom). (Reprinted with permission from Le Gac, S., et al., J. Chromatogr. B, 808, 3, 2(K)4. Copyright 2004 Elsevier B.V.) Conditions sample concentration 800 fmol, mobile phase A, 5% acetonitrile in 0.1% aqueons formic acid, mobile phase B, 95% acetonitrile in 0.1 % aqueous formic acid, gradient 5-50% B in A in 30 min, 50-95% B in A in 1 min, flow-rate 200 nL/min. 

The present paper siunmarizes the potential of advanced, microsystems compatible piezo technologies for active structures and systems. Examples will be given related to the integration in silicon wafer, ceramic multilayer, polymer and metal matrix architectures. 

Exemplary developments of microsystems as pre-integration platform in smart structure technology are described in the present paragraph. There are two promising approaches seen allowing for the integration of piezoceramic units and electronic circuits, flexible circuits boards and active ceramic multilayer devices. 

Macroporous silicon technology found its principal application in integrated microsystems as sacrificial layer multilayered and suspended structures, such as bridges, membranes, and cantilevers, often require fabrication, almost always by isotropic etching and removing, by alkaline-based... 

By a plasma activation of the surfaces, the bonding temperature at comparable strength can be reduced to below 400 °C. This process opens up a new technology, especially in multilayer microsystems, as they are necessary for the production of... 

Moss, E.D., Han, A., and Frazier, A.B. (2007) A fabrication technology for multilayer polymer-based Microsystems with integrated fluidic and electrical fimctionality. Sensor. Actual. B, 121, 689-697. 

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