Electrochemical microsystem technology EMST

In the area of electrochemical micro and nanofabrication, electrochemical microsystem technology (EMST) is an emerging and fast developing field with many challenging opportuiuties. Chapter 11 focuses on different features of EMST. Applications of EMST in microsystem technology and other miscellaneous applications of EMST have been reported. EMST has the possibility to establish a link between the conventional macroscopic electrochemistry and the electrochemical nanoscience. 

Microsystem Technology (EMST) Micr ratteming, Plating, Microforming, Electrochemical Microcell... 

Electrochemical microsystem technology can be scaled down from macroscopic science to micro and further to nanoscale through EMST to ENT [1]. In ENT, electrochemistry involves in the production process to realize nanoproducts and systems which must have reproducible capability. The size of the products and systems must be in the submicron range. It considers electrochemical process for nanostructures formation by deposition, dissolution and modification. Electrochemical reactions combining ion transfer reactions (ITR) and electron transfer reactions (ETR) as applicable in EMST are also applied in ENT. Molecular motions play an important role in ENT as compared with EMST. Hence, mechanical driven system has to be changed to piezo-driven system to achieve nanoscale motions in ENT. Due to the molecular dimension of ENT, quantum effects are always present which is not important in the case of EMST. The double layer acts as an interface phenomenon between electrode and electrolyte in EMST, however, double layer in the order of few nanometers even in dilute electrolyte interferes with the nanostmcture in ENT. 

The dimension and scope of electrochemical microsystem (EMST) become smaller and smaller. Miniaturization continues further to electrochemical nanotechnology (ENT) due to the development of more sophisticated and sensitive electrochemical equipments, possibility of nanoscale resolution movements with application of piezo techniques and improvement of other microsystem technology... 

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