Electronic materials processing

Chemical vapor deposition (CVD) reactions in electronics materials processing provide further examples. One is the deposition of Si from silane ... 

Klavs F. Jensen is a professor of chemical engineering and materials science and a fellow of the Supercomputer Institute at the University of Minnesota. He received his undergraduate education at the Technical University of Denmark and his Ph.D. from the University of Wisconsin-Madison. He has been a visiting professor at the IBM T. J. Watson Research Center, Massachusetts Institute of Technology, and the Technical University of Aachen. His research interests revolve around the chemistry of and transport phenomena related to electronic materials processing, including (1)... 

Specific Materials. Because the fundamental physics and chemistry of reactive gas discharges used for etching is not yet fully understood, empirical approaches to the design of etch processes abound. As indicated earlier, etchant selection begins with considerations of product volatility. Virtually any gas or vapor that can dissociate to form etchant species has been considered or studied. An abbreviated list of the most common reactant molecules used to etch films of interest in electronic materials processing is given in Table IV. 

Make electronic materials processing a science and improve U.S. competitiveness. Processing is clearly mainly chemical and poor processing... 

Figure 4. The role of chemical engineers in electronic material processing.

Williams, D. S., Sze, S. M and Wagner, R. S., eds., Proceedings of the First Electronics Materials Processing Conference, American Society for Metals, September 1988. 

The emergence of electronic materials processing, along with other specialized topics within the chemical engineering discipline, raises questions about research, teaching, and the profession in general, questions similar to those asked in other areas, such as biotechnology. The aim of this dis-... 

Electronic materials processing demands high-purity starting materials. Even minute quantities of impurities have the potential to alter or destroy the electronic and optical properties of a device. Unlike many other chemical... 

Table 1. Examples of Unit Operations in Electronic Materials Processing...

Research in electronic materials processing must necessarily revolve around one general question How do structural, electronic, and optical properties of a material or a device depend on the processing and how can they be controlled ... 

The fabrication of microelectronic and photonic components involves long sequences of batch chemical processes. The manufacture of advanced microstructures can involve more than 200 process steps and take from 2 to 6 weeks for completion. The ultimate measure of success is the performance of the final circuits. The devices are highly sensitive to process variations and are difficult, if not impossible, to repair if a particular chemical process step should fail. Furthermore, because of intense competition and rapidly evolving technology, the development time from layout to final product must be short. Therefore, process control of electronic materials processing holds considerable interest [30, 31]. The process control issues involve three levels ... 

Because of the batchwise nature of electronic materials processing and the long process sequences, a supervisory system is essential. This system collects information on the state of the system gives status of work in progress schedules work based on process priorities, product requirement, equipment readiness, and materials availability and controls product and raw material inventories. Materials handling concerns the physical movement of wafers through the fabrication line via various mechanical means [32] and is therefore primarily a mechanical engineering problem. The control of the individual unit operations and the incorporation of local control functions in... 

D. Common Aspects of Electronic Materials Processing Research... 

Jensen, R. J. submitted for publication in Chemical Engineering in Electronic Materials Processing Hess, D. W. Jensen, K. V., Eds. Advances in Chemistry Series American Chemical Society Washington D.C. 

Maroudas, D. and Shankar, S. (1996) Electronic Materials Process Modeling. 

Photochemical surface reactions of polymer systems are an important field not only from the point of view of micro-electronic materials processing, but also from a more general scientific and materials application perspective. We have reviewed our studies in this field, which include investigations of excimer laser ablation, studies of the photo-oxidation of polymer surfaces, and the use of surface cross-linking and surface polymer depositions for microlithographic applications. With the increasing miniaturization of microelectronic devices, the fundamental and the applied aspects of surface photochemistry of polymers becomes increasingly important. 

In what follows, the fundamentals of plasma engineering are discussed with emphasis on plasma etching. Discussion pertains to the kind of plasmas used in electronic materials processing. Similarities and differences with electrochemical reactor engineering are pointed out along the way, and are summarized in Section 8. 

Organic Electronics Materials, Processing, Devices and Applications... 

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