Semiconductor industry systems

Positive-Tone Photoresists based on Dissolution Inhibition by Diazonaphthoquinones. The intrinsic limitations of bis-azide—cycHzed mbber resist systems led the semiconductor industry to shift to a class of imaging materials based on diazonaphthoquinone (DNQ) photosensitizers. Both the chemistry and the imaging mechanism of these resists (Fig. 10) differ in fundamental ways from those described thus far (23). The DNQ acts as a dissolution inhibitor for the matrix resin, a low molecular weight condensation product of formaldehyde and cresol isomers known as novolac (24). The phenoHc stmcture renders the novolac polymer weakly acidic, and readily soluble in aqueous alkaline solutions. In admixture with an appropriate DNQ the polymer s dissolution rate is sharply decreased. Photolysis causes the DNQ to undergo a multistep reaction sequence, ultimately forming a base-soluble carboxyHc acid which does not inhibit film dissolution. Immersion of a pattemwise-exposed film of the resist in an aqueous solution of hydroxide ion leads to rapid dissolution of the exposed areas and only very slow dissolution of unexposed regions. In contrast with crosslinking resists, the film solubiHty is controUed by chemical and polarity differences rather than molecular size. 

Vacuum systems, largely for the semiconductor industry, are the main source of sales (see Semiconductors). The sales of all vacuum equipment, pumps (qv), valves, sensors (qv), etc, in the United States, including apphcations not in vacuum systems, generally exceed 500 X 10 /yr. A reasonably comprehensive hst of high vacuum manufacturers is supphed by the American Vacuum Society s exhibitor s hst. In Europe, a special issue of the journal A acuum serves similady. 

Spatial information about a system can be obtained by analyzing the spatial distribution of PL intensity. Fluorescent tracers may be used to image chemical uptake in biological systems. Luminescence profiles have proven useftil in the semiconductor industry for mapping impurity distributions, dislocadons, or structural homogeneity in substrate wafers or epilayers. Similar spatial infbrmadon over small regions is obtained by cathodoluminescence imaging. 

The polymer, like many fluorine-containing polymers has very good weathering resistance and may also be used continuously up to 150°C. Outside of the electrical field it finds use in fluid handling, in hot water piping systems, in packaging and in chemical plant. A widely used specific application for PVDF is in ultra-pure water systems for the semiconductor industry. 

Arsenic and antimony are metalloids. They have been known in the pure state since ancient times because they are easily obtained from their ores (Fig. 15.3). In the elemental state, they are used primarily in the semiconductor industry and in the lead alloys used as electrodes in storage batteries. Gallium arsenide is used in lasers, including the lasers used in CD players. Metallic bismuth, with its large, weakly bonded atoms, has a low melting point and is used in alloys that serve as fire detectors in sprinkler systems the alloy melts when a fire breaks out nearby, and the sprinkler system is activated. Like ice, solid bismuth is less dense than the liquid. As a result, molten bismuth does not shrink when it solidifies in molds, and so it is used to make low-temperature castings. 

Until about the 1970s, much of the CVD equipment for semiconductor applications was designed and built in-house and a CVD equipment industry was still embryonic. Since then, there has been a considerable shift to standardized systems built by specialized equipment manufacturers particularly for the semiconductor industry, and today sophisticated production and test equipment is readily available. 

The semiconductor industry makes heavy use of manufacturing data to provide ongoing quality control information. RS/1 is used as the central software tool to tie together a number of different data bases and software systems to make the data available for graphing and analysis. 

System installation in a permanent location may require a sample conditioning system featuring some degree of automation, such as automatic cleaning (the system illustrated above features such a system) and outlier sample collection and the need to interface to an existing control system process computer. The latter may require that the system operates with a standardized communications protocol, such as Modbus, for the chemical industry. Certain specialized industries use different protocols, such as the semiconductor industry, which uses SECS and SEC-11 protocols. A standardized approach designated the Universal Fieldbus is another method/protocol for process analyzers which is being supported by certain hardware manufacturers. 

The scarcity of efficacious insulation candidates prompted the Semiconductor Industry Association to identify the criticality of low-k dielectric material development. Thus, in June 1995, Dow made a business commitment to invent a new material specifically tailored for the interconnect application. Specific performance targets were defined based on interactions with the industry, experience gained through Dow s earlier benzocyclobutene-based systems, finite element analysis of the anticipated interconnect structures, and principles of material sciences. 

---