Resist Performance Parameters

Although the bulk properties such as sensitivity (E0), contrast (y), and developer selectivity (n) discussed earlier represent characteristics of a resist, fine line lithography provides the most meaningful and precise judgment on the performance of a resist. 

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An additional consideration under mechanical properties is the characterization of formulation performance by measuring solvent resistance. This parameter is defined as the ability of an elastomeric closure to retain original mechanical and physical properties without undue dimensional change, decomposition or... 

Most solid-state sensors are heated to well above 100°C and can operate in the "cold start" condition in a fuel cell. Another important performance parameter for a hydrogen sensor in a fuel cell is its resistance to water entry. Most fuel cells have excess of liquids including water during operation. It is highly possible that water will splash or penetrate into the hydrogen sensor mounted in the ventilation or outlet of a fuel cell. Hydrophobic... 

Even at their best, the models are able to predict only macroscopic properties of the films, yielding no information on microscopic parameters that may affect resist performance. It is highly probable that spin casting induces some structure or preferential chain orientation into the films, or causes secondary effects such as the aggregation observed by Law. These effects are barely addressed in the currently available literature. However, some earlier works (3.17-191 on solvent (static) cast films have investigated the molecular orientation of polymer chains as well as chain relaxation due to thermal annealing. 

Lifetime performance degradation is a key performance parameter in a fuel cell system, but the causes of this degradation are not fully understood. The sources of voltage decay are kinetic or activation loss, ohmic or resistive loss, loss of mass transport, or loss of reformate tolerance (17). 

Rational optimization of performance should be the main goal in development of any chemical sensor. In order to do that, we must have some quantitative tools of determination of key performance parameters. As we have seen already, for electrochemical sensors those parameters are the charge-transfer resistance and the double-layer capacitance. Particularly the former plays a critical role. Here we outline two approaches the Tafel plots, which are simple, inexpensive, but with limited applicability, and the Electrochemical Impedance Spectroscopy (EIS), based on the equivalent electrical circuit model, which is more universal, more accurate, and has a greater didactic value. 

It is important to have the correct set of variables specified as independent and dependent to meet the modeling objectives. For monitoring objectives observed conditions, including the aforementioned independent variables (FICs, TICs, etc.) and many of the "normally" (for simulation and optimization cases) dependent variables (FIs, TIs, etc.) are specified as independent, while numerous equipment performance parameters are specified as dependent. These equipment performance parameters include heat exchanger heat transfer coefficients, heterogeneous catalyst "activities" (representing the relative number of active sites), distillation column efficiencies, and similar parameters for compressors, gas and steam turbines, resistance-to-flow parameters (indicated by pressure drops), as well as many others. These equipment performance parameters are independent in simulation and optimization model executions. 

The analysis of the experimental results shows that the introduction of monomer additives leads to an increase in parameters Wc, Gc, and Kc. It is worth noting that introduction of the monomer additive TFS of 3% by weight of sodium silicate (composition 4) gives the best crack resistance performance. 

Among the many parameters (resolution, contrast, sensitivity, etch resistance, storage stability, thermal stability, radiation absorption, adhesion to appropriate substrates, solubility in appropriate solvents, etc.) that are used to describe resists, contrast and sensitivity are the two that are most used to describe resist performance. In the next two chapters, the four constituents of resists are discussed in detail for each resist platform. 

The increase in natural rubber usage translates into approximately 21 kg per tire for a radial construction compared with approximately 9 kg found in a bias buck tire. Natural rubber compounds also tend to And use in covers of high-performance conveyor belts where a similar set of performance parameters such as those of a buck tire bead compound are found. Low hysterebc properties, high tensile sbength, and good abrasion resistance are required for both products. 

Tread-grade carbon blacks can be selected to meet defined performance parameters of rolling resistance, traction, wear, etc. 

Resistance to hydrocarbon oils/solvents and maximum use temperature are key performance parameters for TPEs that dictate in which applications they can be used. As expected, higher performance thermoplastic elastomers are more expensive (Kear, 2003). A qualitative comparison of cost vs. performance is shown for various classes of thermoplastic elastomers in Figure 13.22. Styrenic block copolymers such as SBS and SEES are less costly than TPVs but have reduced oil resistance and lower maximum use temperatures. The advantage of SEES over SES with regard to temperature resistance is not... 

Essentially three performance parameters govern a tire s functions. These are (1) vehicle mission profile (2) mechanical properties and performance such as wear resistance and casing durability and (3) aesthetics, comfort, and behavioral characteristics such as vehicle steering precision. 

FIGURE 1. (a) Parametron semiconductor circuit with a one-to-one correspondence analogue of a dipole double layer. Inductance L, resistance R, and capacitors C, C V). (b) Stability diagram of behavior of the analog model (a) Q = cdL/R is a performance parameter of the circuit and yo is a function of Q, (Oq, 0 (the junction potential of the semiconductor diode), and the amplitude of sinusoidal voltage. Numbers 0, 1, 1, 2,... are dominant fre-... 

This conservative approach has been practically followed in (Burgazzi 2007), when adopting the functional rehahihty concept based on the load-resistance interaction (i.e. a functional failure occurs whenever the apphed load exceeds the component capacity ), in terms of performance parameters, so that system is heUeved to fail if the parameter falls below its limit value. Within this context, a decrease in flow-rate at the end of the mission time due to the inception of potential modes of failure is presumable, and the highest value for the limit parameter is hypothesized to minimize the safety margin. 

The key figures of merit for a photoresist are resolution, process latitudes (dose and focus), and reactive ion etch resistance. Other important performance parameters include sensitivity, compatibility with industrial standard developer (0.263N aqueous tetramethylamoniumhydroxide (TMAH) solution), adhesion to substrates, environmental stability, and shelf life. These performance characteristics are mainly determined by the base polymer in the photoresist. It should be pointed out, however, that some of these performance parameters, such as resolution, process latitudes and etch resistance, are also tool and process condition dependent. 

Proper dissolution of photoresist polymers in aqueous base solutions, usually 0.263N aqueous tetramethylamo-niumhydroxide (TMAH) solution, is critical to achieving good resist performance. The dissolution rate of photoresist polymers depends on various parameters, including polymer type, molecular weight, copolymer composition, interactions with additives in the polymers, as well as temperature and base strength. 

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