SEARCH Articles Figures Tables Dual ion-beam assisted deposition Electron- and Ion Beam-Assisted Deposition (EBAD, IBAD) Ion beam chemical vapor deposition Ion beam deposition films Ion beam enhanced deposition Ion beam enhanced deposition IBED) Ion beam-assisted deposition Ion beam-assisted deposition (IBAD Ion beams Ion cluster beam deposition Mass Selected Ion Beam Deposition (IBD) Mass selected ion beam deposition