SEARCH Articles Figures Tables Advanced chemically amplified resist Amplifiers Chemical amplifier Chemical resistance Chemically amplified cross-linking negative resists Chemically amplified methacrylate negative resists based on acid-catalyzed esterification Chemically amplified negative phenolic resists based on acid-catalyzed condensation intermolecular dehydration cross-linking reactions Chemically amplified negative resists Chemically amplified negative resists based on acid-catalyzed intramolecular dehydration Chemically amplified negative resists based on acid-catalyzed pinacol rearrangement Chemically amplified negative resists based on radiation-induced polarity changes Chemically amplified positive resist system Chemically amplified positive resists based Chemically amplified resist Chemically amplified resist Chemically amplified resist mechanisms Chemically amplified resist process Chemically amplified resist systems Chemically amplified resists (CARs Non-chemically amplified positive resists Non-chemically amplified positive resists based on main chain scission Process of Chemically Amplified Resists