Chemically amplified negative resists based on acid-catalyzed pinacol rearrangement

1 Chemically amplified negative resists based on acid-catalyzed pinacol rearrangement 

A pinacol-pinacolone rearrangement reaction involving polarity switch of a polar to a nonpolar functional group in a resist polymer has been exploited in 

Ucbino, T. Iwayanagi, and M. Hasbimoto, Pbotobleacbable diazonium salt/pbenolic resin two layer resist systems, Proc. SPIE 920, 100 (1988). 

Reiser, Photoactive Polymers The Science and Technology of Resists, p. 46, John Wiley Sons, Hoboken, NJ (1989). 

Aqueous-base-developable two- and three-component negative resists based on the principle of pinacol rearrangement have also been reported. The 

---