Integrated circuit technology

There is great interest in the use of thin-film platinum siHcide in siHcon-integrated circuit technology. Platinum siHcide has low resistance and high... 

Recently, Van der Schoot and Bergveld74 developed an ISFET-based microlitre titrator by combination with a microcoulometric pH actuator. As a result of integrated circuit technology they could integrate ten pH-sensitive ISFETs... 

Background. The term microsensor denotes a transducer that, in some fashion, exploits advanced miniaturization technology, whether an adaptation of integrated circuit technology, or some other microfabrication technique. Within the past decade, a myriad of microsensors have been developed, with capabilities for measurement of temperature, pressure, flow, position, force, acceleration, chemical reactions, and the concentrations of chemical species. The latter measurements, of chemical species, are intrinsically more difficult than the measurement of mechanical variables because in addition to requirements of accuracy, stability, and sensitivity, there is a requirement for specificity. 

Planar resonators and microstrip and coplanar transmission lines represent the passive elements in almost any integrated circuit technology at first, on chip integration in socalled mmics (monolithic microwave integrated circuits) with SiGe or m/v semiconducting active... 

Terry SC (1975) A Gas Chromatography System Fabricated on a Silicon Wafer Using Integrated Circuit Technology, Ph. D. Thesis, Stanford University... 

Terry, S. C., A gas chromatography system fabricated on a silicon wafer using integrated circuit technology. Ph.D. Dissertation, Stanford University, Stanford, California, 1975. 

Several recent studies7,9,10,23,26 have reported attempts to create silicon nitride by direct ammoniation of silica, usually as a spin-off of the integrated circuit technology research. Most of these studies agree that at temperatures about 1473 K up to 20 -25 % (w/w) nitrogen can be incorporated, but silicon nitride is seldom formed. The final product of this direct nitridation method is silicon-oxynitride (Si2N20) with residual silica. The nitridation is not restricted to the surface, but the N diffuses also into the bulk structure of the silica. No adequate mechanisms were presented to explain the observed reactions. 

An important new application for MOCVD is the deposition of pure metal films for semiconductor integrated circuit applications. Important metals deposited by MOCVD include Al, Cu, CuAl alloys, and W films using precursors listed in Table I. It is expected that this application area for MOCVD will expand rapidly in the next few years as the demand increases for high-density metal interconnects for Si integrated circuit technology. High-purity Al metal films have also been grown by MOCVD. 

Raymond Jin, New generation CMP equipment and its impact on IC devices , 1998. proceedings of 5 International Conference on Solid-State and Integrated-Circuit Technology, pp. 116-119. 

M. J. Declercq, L. Gerzberg, and J. D. Meindl, Optimization of the hydrazine-water solution for Anisotropic etching of silicon in integrated circuit technology, J. Electrochem. Soc. 122, 545, 1975. 

The design of mini and micro systems calls for a multidisciplinary approach involving engineering, materials science, electronics and chemistry. With the advances in integrated circuit technology and micromachining of liquid filters,... 

An additional advantage of the integrated circuit technology is the ability to integrate the various components, such as the transducer, reactor, valve, pump etc., within the electronic system, forming refined flow-analysis systems on silicon wafers. Several approaches, such as electrostatic, electromagnetic, piezoelectric, thermopneumatic and thermoelectric can be employed for force transduction in the microvalves, these are also applicable to micropumps. Based on these approaches, two versions of micropumps have been developed. These are connected in parallel the first pump (dual pump) is activated with periodic two-phase voltage, while the second pump (the buffer pump) is driven by two piezoelectric actuators. Microsensors of two kinds are described below a thermopile based- and a thermistor based microbiosensor. 

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