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Mechanical trenching

The center-drive mechanism and feed launder are usually supported by a walkway that extends across one-half or the whole diameter of the basin. Devices having drive mechanisms and rakes supported by a tmss across the diameter of the thickener are referred to as bridge machines. The bridge thickeners usually do not exceed 25—45 m in diameter. In thickeners with larger diameters, the drive mechanism is supported by a central column or pier and the rates are driven and supported by a drive cage. The sediment is discharged into an aimular trench around the bottom of the column. [Pg.322]

Where there is available ground and the specific resistivity of soil in the upper layers is low, the anodes are laid horizontally [3]. A trench 0.3 to 0.5 m wide and 1.5 to 1.8 m deep is dug with, for example, an excavator or trench digger (see Fig. 9-2). A layer of coke 0.2-m thick is laid on the bottom of the trench. The impressed current anodes are placed on this and covered with a 0.2-m layer of coke. Finally the trench is filled with the excavated soil. No. IV coke with a particle size of 5 to 15 mm and specific gravity of 0.6 t m" is backfilled at a rate of 50 kg per meter of trench. The anodes are connected in parallel and every three to four anode cables are connected to the anode header cable by a mechanical cable crimp encapsulated in an epoxy splice kit to give an economical service life at high current output. [Pg.244]

FBE-coated pipe requires careful handling from factory to the pipe trench to avoid mechanical damage. Repairs are undertaken with either trowel or brush-applied, liquid two-pack epoxy resin-based paints or by melt sticks of compressed powder. [Pg.670]

MOSFETT s, and silicon oxide is deposited. The source/drain positions where electrical contact is to be made to the MOSFETs are defined, using the oxide-removal mask and an etch process. For shallow trench isolation, anisotropic silicon etch, thermal oxidation, oxide fill and chemical mechanical leveling are the processes employed. For shallow source/drains formation, ion implantation techniques are still be used. For raised source/drains (as shown in the above diagram) cobalt silicide is being used instead of Ti/TLN silicides. Cobalt metal is deposited and reacted by a rapid thermal treatment to form the silicide. Capacitors were made in 1997 from various oxides and nitrides. The use of tantalmn pentoxide in 1999 has proven superior. Platinum is used as the plate material. [Pg.333]

D. Randall, Burggren, W. and Trench, K. (2002). Eckert Animal Physiology - Mechanisms and... [Pg.391]

These pressure tests should be seen in the context of the mechanical stresses and subsequent failures in the field. In spite of all precautions on installation it must be assumed that pipes will be damaged, backfill and trenches will differ from those specified, welds may be imperfect and there will be bending stresses. Poor installation practice has been the principal cause of service failures, particularly of PVC pipe, and when installed correctly pipes taken from service (now 40 years) show no evidence of deterioration. In addition, polymers have improved greatly since pipes were first manufactured. Marshall and co-workers [2] describe the situation in more detail and recommend an approach to testing based on fracture mechanics. [Pg.154]

It is seen from the discussion above that Cu is electrodeposited in vias and trenches on a bilayer a barrier metaVCu seed layer. When the barrier layer is composed of two layers (e.g., TiN/Ti), Cu is electrodeposited as a trilayer a barrier bilayer/Cu seed layer. This type of underlayer for electrodeposition of Cu raises a series of interesting theoretical and practical questions of considerable significance regarding the reliability of interconnects on chips. In Section 19.1 we have noted that interconnect reliability depends on the microstructural attributes of electrodeposited Cu (for Cu-based interconnects). These microstractural attributes, such as grain size, grain size distribution, and texture, determine the mechanical and physical properties of the thin films. Thus, one basic question in the foregoing series of questions is the problem of the influence of the underlayer barrier metal on the microstructure of the Cu seed layer. The second question is the influence of the microstructure of the Cu seed layer on the structure... [Pg.327]

The inhibition-acceleration mechanism. Moffat et al. (37) proposed the inhibition-acceleration mechanism to explain the experimentally observed comer rounding (inversion of curvature. Fig. 19 in Ref. 37) and general shape evolution in superconformal electrodeposition of copper in vias and trenches of nanometer dimensions (37,38). These authors also smdied a three-additive system composed of two inhibitors and one accelerator. They concluded that superconformal deposition and comer rounding may be attributed to competitive adsorption of inhibitor and accelerator. This model is based on the assumption of curvature (in vias and trenches) -enhanced accelerator coverage. [Pg.329]

The acceptance of chemical mechanical planarization (CMP) as a manufacturable process for state-of-the-art interconnect technology has made it possible to rely on CMP technology for numerous semiconductor manufacturing process applications. These applications include shallow trench isolation (STI), deep trench capacitors, local tungsten interconnects, inter-level-dielectric (ILD) planarization, and copper damascene. In this chapter. [Pg.5]

Y.-L. Wang, C. Liu, M.-S. Feng, J. Dun, K.-S. Chou, Effects of underlying films on the chemical-mechanical polishing for shallow trench isolation technology, J. Thin Solid Films, 308 309, pp. 543-549, 1997. [Pg.42]

B. Withers, E. Zhoa, R. Jairath, A Wide Margin CMP and Clean Process for Shallow Trench Isolation Applications, 1998 Proceedings of the Third International Chemical-Mechanical Planarization for VLSI Multilevel Interconnection Conference (CMP-MIC), Santa Clara, CA, pp. 319-327, Feb. 19-20,1998. [Pg.42]

C. Yu, P. C. Fazan, V. K. Mathews, and T. T. Doan, Dishing Effects in a Chemical Mechanical Polishing Planarization Process for Advanced Trench Isolation, Appl. Phys. Lett., vol. 61, no. 11, pp. 1344-1346, Sept. 1992. [Pg.137]

Renovation and Salvage. Similar to regulations outlined under "Trench Mortar Ammunition", with the exception that bouchons and firing mechanisms are not ten ova ted or salvaged unless directed by the proper authority Destruction. For offensive hand grenades and and rifle grenades, not more than 40 grenades shall be packed in close contact with each other in a box and the ensemble placed in a pit, about 4 ft deep, free from stones or other... [Pg.782]

As compared to electrical SPL, a broader range of materials becomes accessible for surface modifications using mechanical means. Two different approaches have been developed based on SFM surface scratching and material transfer. In the first approach, a scratch or trench of a defined width and depth can be produced by dragging the tip across the sample under controlled load and speed. In the second and more elegant approach, small portions of the sample, e.g. molecules and particles, are picked up by the tip, lifted and transferred to another region of the surface. [Pg.137]


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Chemical mechanical planarization shallow trench isolation

Trench

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