Titanium fabrication process

Ohtsu, N., Hirano, M., and Arai, H. (2014) Response of osteoblast-like MC3T3-E1 cells on bioactive titanium fabricated by a chemical treatment process using a calcium phosphate slurry. J. Biomed. Mater. Res. A. doi 10.1002/jbm.a.35053... 

With the titanium silicide contacts in place, the next step in the CMOS fabrication process flow is the via-1 and tungsten plug formation, which involves the formation of metal connecting lines between transistors and other titanium silicide contacts. 

A practical, easy approach to designing with plastics and reinforced plastics (RPs) is basically no different than designing with other materials such as steel, aluminum, titanium, copper, wood, and so forth. Each material has its respective advantages that require certain different design approaches. For example, with about 17,000 plastics available worldwide, one has to comprehend factors such as the range of their different properties, structural responses, product-performance characteristics, part shapes, available fabricating processes and their influence on product per-... 

Eigure 1 presents a simplified schematic for the fabrication process of the proposed LIGA-Uke technique in SU-8 epoxy resin. Briefiy, a substrate is firstly coated with metal seed layers for the electroforming process (Fig. la). A chromium or titanium layer with a thickness of several hundred angstroms is usually used as the adhesion layer. A gold or copper seed layer of several micrometers in thickness is then deposited on the adhesion layer to be the bottom... 

Chemical-Process Vessels. Explosion-bonded products are used in the manufacture of process equipment for the chemical, petrochemical, and petroleum industries where the corrosion resistance of an expensive metal is combined with the strength and economy of another metal. AppHcations include explosion cladding of titanium tubesheet to Monel, hot fabrication of an explosion clad to form an elbow for pipes in nuclear power plants, and explosion cladding titanium and steel for use in a vessel intended for terephthaHc acid manufacture. 

Stainless Steel There are more than 70 standard types of stainless steel and many special alloys. These steels are produced in the wrought form (AISI types) and as cast alloys [Alloy Casting Institute (ACI) types]. Gener y, all are iron-based, with 12 to 30 percent chromium, 0 to 22 percent nickel, and minor amounts of carbon, niobium (columbium), copper, molybdenum, selenium, tantalum, and titanium. These alloys are veiy popular in the process industries. They are heat- and corrosion-resistant, noncontaminating, and easily fabricated into complex shapes. 

Specific fabrication temperatures are given by Czarnecki etalJ for various forming processes, including roll forming, hydropressing, joggle and die forming on molybdenum-titanium alloy sheet. 

Interconnect. Three-dimensional structures require interconnections between the various levels. This is achieved by small, high aspect-ratio holes that provide electrical contact. These holes include the contact fills which connect the semiconductor silicon area of the device to the first-level metal, and the via holes which connect the first level metal to the second and subsequent metal levels (see Fig. 13.1). The interconnect presents a major fabrication challenge since these high-aspect holes, which may be as small as 0.25 im across, must be completely filled with a diffusion barrier material (such as CVD titanium nitride) and a conductor metal such as CVD tungsten. The ability to fill the interconnects is a major factor in selecting a thin-film deposition process. 

Zirconium oxide (ZrO ) is the most common compound of zirconium found in nature. It has many uses, including the production of heat-resistant fabrics and high-temperature electrodes and tools, as well as in the treatment of skin diseases. The mineral baddeleyite (known as zirconia or ZrO ) is the natural form of zirconium oxide and is used to produce metallic zirconium by the use of the Kroll process. The KroU process is used to produce titanium metal as well as zirconium. The metals, in the form of metaUic tetrachlorides, are reduced with magnesium metal and then heated to red-hot under normal pressure in the presence of a blanket of inert gas such as helium or argon. 

Methods have been developed for fabrication of the highly-ordered titania nanotuhe arrays from titanium thin films atop a substrate compatible with photolithographic processing, notably silicon or FTO coated glass [104]. The resulting transparent nanotuhe array structure, illustrated in Fig. 5.16, is promising for applications such as anti-reflection coatings and dye sensitized solar cells (DSSCs). Fig. 5.17 shows the typical anodization behavior of a 400 nm Ti thin film anodized at 10 V in an HE based electrolyte. Eor a fixed HE concentration, the dimensions of the tube vary with respect to... 

---