Silicon thin films

The physical structures of microchip assemblies usually contain a number of thin films in contact, each of which plays a separate role in the performance of the device. As an example, in one structure a silicon thin film would be contacted on one face by a copper rod which conducts away die heat generated during computer operations, and on the other face by an aluminium thin film which acts as a connector to other silicon films. This aluminium film is in turn in contact with a ceramic layer containing other thin film devices, and widr copper pins which plug into the circuit board. 

Dimitrios Maroudas, Modeling of Radical-Surface Interactions in the Plasma-Enhanced Chemical Vapor Deposition of Silicon Thin Films Sanat Kumar, M. Antonio Floriano, and Athanassiors Z. Panagiotopoulos, Nanostructured Formation and Phase Separation in Surfactant Solutions Stanley I. Sandler, Amadeu K. Sum, and Shiang-Tai Lin, Some Chemical Engineering Applications of Quantum Chemical Calculations... 

Kane, M. G. Goodman, L. Firester, A. H. van der Wilt, P. C. Limanov, A. B. Im, J. S. 2005.100MHz CMOS circuits using sequential laterally solidified silicon thin-film transistors on plastic. IEEE International Electron Devices Meeting Tech. Digest 2005 1087-1089. 

Kuo, Y. (Editor). 2004. Thin-Film Transistors Materials and Processes, Amorphous Silicon Thin-Film Transistors, Polycrystalline Silicon Thin Transistors. Kluwer, New York. 

Afentakis, T. Hatalis, M. Voutsas, A. T. Hartzell, J. 2006. Design and fabrication of high-performance polycrystalline silicon thin-film transistor circuits on flexible steel foils. IEEE Trans. Electron Dev. 53 815-822. 

Hara, A. Takei, M. Takeuchi, F. Suga, K. Yoshino, K. Chida, M. Kakehi, T. Ebiko, Y. Sano, Y. Sasaki, N. 2004. High performance low temperature polycrystalline silicon thin film transistors on non-alkaline glass produced using diode pumped solid state continuous wave laser lateral crystallization. Jpn. J. Appl. Phys., Pt. 1 43 1269-1276. 

Hong, C. Wagner, S. 2000. Inkjet printed copper source/drain metallization for amorphous silicon thin-film transistors. IEEE Electron Dev. Lett. 21 384-386. 

Menard, E. Nuzzo, R. G. Rogers, J. A. 2005. Bendable single crystal silicon thin film transistors formed by printing on plastic substrates. Appl. Phys. Lett. 86 093507. 

MJ Powell, C van Berkel, and JR Hughes, Time and temperature dependence of instability mechanisms in amorphous silicon thin-film transistors, Appl. Phys. Lett., 54 1323-1325, 1989. 

Amorphous Silicon Thin-Film Transistor Active-Matrix Organic Light-Emitting Displays... 

J. Kanicki and S. Martin, Hydrogenated amorphous silicon thin-film transistors, in Thin-Film Transistors, C.R. Kagan and P. Andry, Eds., Marcel Dekker, New York, 2003. 

J.-H. Kim and J. Kanicki, Amorphous silicon thin-film transistors-based active-matrix organic light-emitting displays, SID Tech. Dig., 614—617, 2002. 

Y. Hong, J.-Y. Nahm, and J. Kanicki, Opto-electrical properties of 200 dpi four amorphous silicon thin-film transistors active-matrix organic polymer light-emitting display, Appl. Phys. Lett., 83, 3233-3235, 2003. 

Koh J, Ferlauto AS, Rovira PI, Wronski CR, Collins RW (1999) Evolutionary phase diagram for plasma enhanced chemical vapor deposition of silicon thin films from hydrogen diluted silane. Appl Phys Lett 75 2286-2289... 

Growth and temperature behavior of silicon thin films deposited on Ag(OOl) have been investigated by Leandri etal. 

Dimitries Maroudas, Modeling of Radical-Surface Interactions in the Plasma-Enhanced Chemical Vapor Deposition of Silicon Thin Films... 

With materials of this type FIM finds its limitations. Several attempts have been made to use field ion microscopy to study amorphous materials such as metallic glasses and amorphous silicon or hydrogenated amorphous silicon thin films deposited on metal tip surfaces.96"98 100-102 Since there is no well defined crystal lattice, the structure of an amorphous material is usually described by the pair distribution function of the... 

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