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Polycrystalline ferroelectric pto thin films on platinized silicon substrates

2 Polycrystalline ferroelectric PTO thin films on platinized silicon substrates [Pg.344]

This is due to contamination of the pto thin film with a natural water layer and physical adsorbates. This contamination leads to a reduced piezoelectric response in the pfm measurement. There are two possibilities of desorbing the contamination. The first one is to scan the [Pg.345]




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0-PtO

Ferroelectric thin films

Ferroelectrics thin films

Platinate

Platination

Platinic

Platinization

Platinized

Platinizing

Polycrystalline

Polycrystalline silicon

Polycrystalline thin films

Polycrystallines

Polycrystallinity

Silicon substrate

Silicon thin films

Silicone film

Silicone substrate

Substrate polycrystalline

Thin ferroelectric

Thin film on substrate

Thin polycrystalline

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