Lithography nanoimprint

Park, J. D. Lee, K. D. 2007. Method for manufacturing stamp for nanoimprint lithography having two-dimensional pattern of uniform size and shape, and method for photonic crystal using the same. LG Electronics Inc., S. Korea. 

Figure 6.12 Preparation of patterned LBL assemblies (a) by nanotransfer printing and (b) by sequentially using nanoimprinting lithography, CD SAM formation, and lift-off process. Reprinted with permission from Crespo-Biel et al. (2006).

Maury P, Escalante M, Reinhoudt DN, Huskens J (2005) Directed assembly of nanoparticles onto polymer-imprinted or chemically patterned templates fabricated by nanoimprint lithography. Adv Mater 17 2718-2723... 

To further miniaturize the sensors, nanotechniques such as surface probe microscopy and lithography, lateral force microscopy, atomic force microscopy (AFM), and AFM lithography can be utilized.46 Nanoimprint lithography is a low-cost technique that has been shown to produce patterns on the nanometer scale.98 99... 

Jeong J, Sim Y, Sohn H, Lee E. UV-nanoimprint lithography using an elementwise patterned stamp. Microelectronic Engineering 2004, 75, 165-171. 

Unconventional patterning techniques, such as soft lithography (e.g., microcontact printing), nanoimprint lithography, and scanning probe lithography, are increasingly used for the cost-effective fabrication of nanostructures. They are particularly attractive because they can be performed even without cleanroom facilities. 

NHA NHS NHSCnSH NIL NIR NLO NLS carbon nanohorn aggregate V- h ycl to x v su cc i n i m i de / yl 11 -mercaptoundecanoyl-A-hydroxysuccinimide ester nanoimprint lithography near infrared nonlinear optics nuclear localization sequence (peptide sequence for nuclear targeting)... 

Behl M, Seekamp J, Zankovych S, Torres CMS, Zentel R and Ahopelto J, Towards plastic electronics Patterning semiconducting polymers by nanoimprint lithography , Adv Mater, 2002 14 588-591. 

Lucas BD, Kim JS, Chin C, Guo LJ (2008) Nanoimprint lithography based approach for the fabrication of large-area, uniformly oriented plasmonic arrays. Adv Mater 20 1129 Alvarez-Puebla R, Cui B, Bravo-Vasquez J, Veres T, Fenniri H (2007) Nanoimprinted SERS-active substrates with tunable surface plasmon resonances. J Phys Chem C 111 6720... 

Elastomer templates for nanoimprinting of the type devised by Kostovski et al. for their optical fiber nanoimprint lithography could be used to rapidly reproduce the butterfly wing nanostructures or those produced by reactive ion etching. This would further reduce production time and costs. Whatever means are employed to improve the production techniques for these butterfly and cicada wing substrates, it is clear that there is great potential for their application in biosensing. 

Kostovski G, Chinnasamy U, JayawardhanaS et al (2011) Sub-15 nm optical fiber nanoimprint lithography a parallel, self-aligned and portable approach. Adv Mater 23(4) 531-535... 

The ability to fabricate nanostructures is essential to modem science and technology [1], Nanoimprint lithography (NIL) in its various forms has demonstrated potential applications in the fabrication of semiconductor devices, microfluidic devices, optical components, photonic devices, replica mold components and biological objects [2],... 

Fig. 1 Schematic of (A) nanoimprint lithography and (B) step-and-flash imprint lithography. (View this art in color at www.dekker.com.)...

DEVELOPING BETTER RESIST MATERIALS FOR NANOIMPRINT LITHOGRAPHY... 

Komuro, M. Hiroshima, H. Kobayashi, K. Miyazaki, T. Ohyi, H. Preparation of diamond mold using electron beam lithography for application to nanoimprint lithography. Jpn. J. Appl. Phys. 1 (Regular Papers Short Notes Review Papers) 2000, 39 (12B), 7070-7074. 

Komuro, M. Hiroshima, H. Diamond nanoimprint lithography. Nanotechnology 2002, 13 (5), 592-596. 

Beck, M. Graczyk, M. Maximov, L Sarwe, E.L. Ling, T.G.I. Keil, M. Montelius, L. Improving stamps for lOnm level wafer scale nanoimprint lithography. Microelectr. Eng. 2002, 61-62, 441-448. 

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