Lithography scanning probe

Kaholek M, Lee WK, LaMattina B, Caster KC, Zauscher S. Fabrication of stimulus-responsive nanopattemed polymer bmshes by scanning-probe lithography. Nano Lett 2004b 4 373-376. 

Dip-pen nanolithography (DPN) is a variety of scanning probe lithography (direct-write) developed by Mirkin and coworkers, where components of interest are transferred from an AFM tip to a substrate.201 DPN has been used to pattern a wide variety of materials on surfaces, including small organic molecules (most commonly n-alkanethiols), DNA, nanoparticles, proteins, viruses, and precursors for inorganic thin films. 

Liu, G.-Y., S. Xu, and Y. Qian. 2000. Nanofabrication of self-assembled monolayers using scanning probe lithography. Acc. Chem. Res. 33 457-466. 

Unconventional patterning techniques, such as soft lithography (e.g., microcontact printing), nanoimprint lithography, and scanning probe lithography, are increasingly used for the cost-effective fabrication of nanostructures. They are particularly attractive because they can be performed even without cleanroom facilities. 

The application of scanning probe lithography (SPL) has been widespread owing to its ability to modify substrates with very high resolution and ultimate pattern flexibility.96 Dip-pen nanolithography (DPN),97 high contact force AFM,98 and constructive nanolithography99 are some of the most commonly employed techniques, all of which aim to control the position and directed assembly of molecules and nanoparticles. 

Scanning probe lithography on metal or silicon substrates is a well known technique and can be supported by a self-assembled monolayer (SAM) [1,2], Such monolayers are of great interest e.g. for passivation of silicon surfaces [3]. Covalently bound monolayers by Si-C bonds that are formed by the reaction of 1-alkenes and a hydrogen terminated silicon surface [4,5], are known to show high thermal [6] as well as chemical stability [3,7]. 

Sugimura H, Nakagiri N (1997) Organosilane monolayer resists for scanning probe lithography. J Photopolym Sci Technol 10 661-666... 

Liu, G. Qian, Y. and Xu, S. (2000). Nanofabrication of Self-Assembled Monolayers Using Scanning Probe Lithography. Accounts of Chemical Research 33 457. 

Fig. 3 Schematic of the different aspects of surface functionalization, patterning and analysis treated in this review. The topic is introduced and developed starting from the discussion of well-defined model systems (SAMs on Au). The determination of structure-reactivity relationships, and in particular the way conformational order affects the reactivity of NHS active esters will be discussed. Using iCFM, very localized information on surface reactions can be quantitatively measured in situ for SAM-based systems. The extension of the dimensionality to quasi-3D systems via the immobilization of den-drimers and the fabrication of thin reactive homopolymer films will be addressed, as well as micro- and nanopatterning approaches via soft and scanning probe lithography. Here we discuss SAM-based, as well as bilayer/vesicle-based systems...

---