Nanoimprint

Park, J. D. Lee, K. D. 2007. Method for manufacturing stamp for nanoimprint lithography having two-dimensional pattern of uniform size and shape, and method for photonic crystal using the same. LG Electronics Inc., S. Korea. 

Fig. 8.7 Fabrication sequence of a polymer microring resonator (a) prepare a nanoimprint mold (b) spin coat a polymer thin film (c) perform nanoimprinting process (d) separate the sample from the mold (e) dry etch the residual layer (f) create pedestals by wet etch...

To demonstrate Fano-resonant behavior, a polystyrene microring resonator is nanoimprinted and two waveguide offsets are introduced in the bus waveguide, which provide partial reflection as shown in Fig. 8.22. Its spectrum is plotted in Fig. 8.23 together with the one without waveguide offsets. The slope is enhanced... 

Guo, L. J., Topical review Recent progress in nanoimprint technology and its applications, J. Phys. D Appl. Phys. 2004, 37, R123 R141... 

Chao, C. Y. Guo, L. J., Polymer micro ring resonators fabricated by nanoimprint technique,... 

Nanofiltration water desalination, energy consumption in, 26 87 Nanogold technology, 12 701 Nanoimprinting, optical, 15 193-195 Nano Indentor, 21 743 Nanoinhibitor design, 10 343 Nanomachines, 24 61-62 Nanomaterials, for sensors, 22 266 NanoMatrix, Inc., collagen nanofiber research, 1 723 Nanomedicine, 10 343... 

Optical nanoimprinting, 15 193—195 Optical nonimaging techniques, spray-related, 23 193—194 Optical nonlinearity, in crystals, 11 94 Optical parametric amplifiers (OPAs), 17 452... 

One of the most successful lithographic techniques is nanoimprint hthography (NIL), mainly because both its working principle and operation are quite simple (Chou et al, 1996). A schematic diagram of the NIL technique is shown in Fig. 3.22. 

Figure 6.12 Preparation of patterned LBL assemblies (a) by nanotransfer printing and (b) by sequentially using nanoimprinting lithography, CD SAM formation, and lift-off process. Reprinted with permission from Crespo-Biel et al. (2006).

Beinhoff M, Appapillai AT, Underwood LD, Frommer JE, Carter KR. Patterned polyfluorene surfaces by functionalization of nanoimprinted polymeric features. Langmuir 2006 22 2411-2414. 

Maury P, Escalante M, Reinhoudt DN, Huskens J (2005) Directed assembly of nanoparticles onto polymer-imprinted or chemically patterned templates fabricated by nanoimprint lithography. Adv Mater 17 2718-2723... 

To further miniaturize the sensors, nanotechniques such as surface probe microscopy and lithography, lateral force microscopy, atomic force microscopy (AFM), and AFM lithography can be utilized.46 Nanoimprint lithography is a low-cost technique that has been shown to produce patterns on the nanometer scale.98 99... 

Jeong J, Sim Y, Sohn H, Lee E. UV-nanoimprint lithography using an elementwise patterned stamp. Microelectronic Engineering 2004, 75, 165-171. 

Unconventional patterning techniques, such as soft lithography (e.g., microcontact printing), nanoimprint lithography, and scanning probe lithography, are increasingly used for the cost-effective fabrication of nanostructures. They are particularly attractive because they can be performed even without cleanroom facilities. 

NHA NHS NHSCnSH NIL NIR NLO NLS carbon nanohorn aggregate V- h ycl to x v su cc i n i m i de / yl 11 -mercaptoundecanoyl-A-hydroxysuccinimide ester nanoimprint lithography near infrared nonlinear optics nuclear localization sequence (peptide sequence for nuclear targeting)... 

Behl M, Seekamp J, Zankovych S, Torres CMS, Zentel R and Ahopelto J, Towards plastic electronics Patterning semiconducting polymers by nanoimprint lithography , Adv Mater, 2002 14 588-591. 

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