Nanoimprint-based lithography

Lucas BD, Kim JS, Chin C, Guo LJ (2008) Nanoimprint lithography based approach for the fabrication of large-area, uniformly oriented plasmonic arrays. Adv Mater 20 1129 Alvarez-Puebla R, Cui B, Bravo-Vasquez J, Veres T, Fenniri H (2007) Nanoimprinted SERS-active substrates with tunable surface plasmon resonances. J Phys Chem C 111 6720... 

Pisignano, D. Persano, L. Visconti, P. Cingo-lani, R. Gigli, G. Barbarella, G. Favaretto, L. Oligomer-based organic distributed feedback lasers by room-temperature nanoimprint lithography. Appl. Phys. Lett. 2003, 83 (13), 2545-2547. 

Although many processes are available or have been proposed for fabricating polymer-based micro- and nanoanalytical devices, including microtransfer, microcontact print-ing, ° dip pen nanolithography, nanoimprint lithography, hot emboss-... 

Glangchai LC, Caldarera-Moore M, Shi L, Roy K. Nanoimprint lithography based fabrication of shape-specific, enzymatically-triggered smart nanoparticles. J Control Release 2008 125(3) 263-72. 

Many of them are based on molding elements (i.e. solid objects with structures of relief on their surfaces) to direct the flow (as in the case of micromolding) or softened solids into the desired shapes. [94-96] The basic one is the embossing technique also referred as nanoimprint lithography (NIL). In this case the mold, made of hard or soft material with specific negative features, is directly pressed against the... 

Back, F., Bockmeyer, M., Rudigier-Voigt, E., and Loebmaim, P. (2014) Periodic nanostructures imprinted on high-temperature stable sol-gel films by ultraviolet-based nanoimprint lithography for photovoltaic and photonic applications. Thin Solid Films, 562, 274-281. 

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