Microelectronics technology

Institute of Microelectronics Technology and High Purity Materials, RAS, 142432 Chernogolovka, Russia, e-mail grazhule ipmt-hpm. ac. ru... 

Although adequate materials and devices are essential, successful manufacturing will require other capabilities as well. First, the process must have high yield, which implies low variability, and provide robust stability to environmental factors. To produce the envisioned products, there must be readily available electronic design tools that can adequately simulate both device and circuit performance. Although some of these computer-aided design tools are available from microelectronics technology, others must either be modified, because of the differences in the thin-hlm devices, or created anew because the devices have no equivalent (nanowires and nanotubes). 

Reichmanis E, Ober CK, MacDonald SA, Iwayanagi T, Nishikudo T (eds) (1995) Microelectronics technology Polymers in advanced imaging and packaging. ACS Symposium Series 614. American Chemical Society, Washington DC... 

The optimization of biocatalysts for the production of bio-based performance materials and nanocomposites is another necessary development to produce new composites. It also includes the combination of nano-biotechnological methodologies with catalysis for the construction of sensor surfaces and microelectronic technologies for the read out of biomolecular interactions. Examples are new... 

U. Dibbern. A Substrate for Thin-Fihn Gas Sensors in Microelectronic Technology , Sensors and Actuators B2 (1990), 63-70. 

In the last case, the use of standard silicon microelectronics technology allow the possibility for integration of optical, fluidics and electrical functions on a single optical sensing circuit leading to a complete lab-on-a-chip technological solution. With this sensor a detection limit in the femtomole range is achievable in a direct format. 

Thin films of phthalocyanine compounds in general, and those prepared by the LB method in particular, display novel electrical properties (Baker, 1985). The LB technique for depositing mono- and multilayer coatings with well-controlled thickness and morphology offers excellent compatibility with microelectronic technology. Such films have recently been reviewed for their potential applications. The combination of LB supramolecular films with small dimensionally comparable... 

The existence of today s silicon based microelectronics technology is evidence for the low surface recombination velocity of oxidized Si. The velocity is less than 103 cm/sec.5,6,7... 

Sensors have been used in industry for years, and the rise of microelectronic technology has caused an increased need for more and better sensor devices. The increasing complexity of technical systems requires development of complex sensor systems - a strategy as nature shows. 

Planar interdigitated electrodes for impedimetric measurements can be produced by means of microelectronic technology [30]. Although this measuring... 

Multi-analyte chips can be produced in this way using microelectronic technology. 

Modified microelectronic technology has created integrated and miniaturized sensor arrays. Additionally, microsystem technology allows to form whole microanalytical systems with integrated fluidics. 

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