IR ellipsometry

An argon-hydrogen plasma is created in a dc thermal arc (cascaded arc) operated at high pressure 0.5 bar) [556, 559. 560] (the cascaded arc is also employed in IR ellipsometry, providing a well-defined source of intense IR radiation see Section 1.5.4 [343]). As the deposition chamber is at much lower pressure (0.1-0.3 mbar), a plasma jet is created, expanding into the deposition chamber. Near the plasma source silane is injected, and the active plasma species dissociate the silane into radicals and ions. These species can deposit on the substrate, which is positioned further downstream. 

Mg Infrared dielectric functions and phonon modes of wurtzite MgZnO, and Mg-rich cubic MgZnO hlms by spectroscopic IR ellipsometry 380-1,200 cm-1, 360-1,500 cm-1, respectively. (See also Sects. 3.3 and 3.4.3) [66-68]... 

In further investigations, Nikonenko et al. used visible and IR spectroscopic ellipsometry to study the adsorption of mucin on poly(acrylic acid)-block-poly(methyl methacrylate) and poly(methyl methacrylate) surfaces at pH 3.0, 7.0, and 10.0. IR ellipsometry experiments indicated that the highest density of hydrogen bonding-involved carboxylic groups is observed at pH 3.0. 

Poly[2-[[11 -(methacryloyloxy)undecyl]oxy]-3-methoxy9,10,16,17,23,24, hexakis (dodecyloxy)phthalocyanine] (polyundecyloxy Langmuir-Blodgett monolayer formation studied with IR, ellipsometry, electron diffraction effect of adding 1 -araohidic acid discussed. [177]... 

Synchrotron IR studies in extreme conditions 6 Synchrotron IR ellipsometry 7 Novel condensed matter compounds 8 Some future directions Conclusions References 152 155 157 159 162 162... 

A. Roseler and W. Molgedey, Improvement in accuracy of sfjectroscopac IR ellipsometry... 

One interesting aspect of the application of IR spectroscopy relates to thin (micrometer) and ultrathin (<50 nm) polymer films, polymer surfaces, and polymer-substrate interfaces [23]. So-called external reflection methods can be used to determine the important properties of thin films (comprising monolayers and multilayers) such as thickness, anisotropy, molecular orientation, and composition. The most frequently applied methods include IR ellipsometry (IRE) [63-67] and IR reflection absorption spectroscopy (IRRAS), which may also be referred to as reflection absorption infrared spectroscopy (RAIRS) [1,23]. 

Bertrand et al. have studied the influence of hydrogen plasma excited by means of microwaves at 2.45 GHz to native oxide films on stainless steel and aluminum. Using in situ IR-ellipsometry, it could be shown that the native oxide on stainless steel was almost completely reduced in a hydrogen plasma. In contradiction to this, the aluminum surface was more resistant and only the outermost hydroxylated part of the oxide layer could be reduced. It was also observed that a dense oxide layer could be grown on the pretreated steel surface by subsequent oxygen plasma [222]. 

In this chapter we review some of the most important developments in recent years in connection with the use of optical teclmiques for the characterization of surfaces. We start with an overview of the different approaches available to tire use of IR spectroscopy. Next, we briefly introduce some new optical characterization methods that rely on the use of lasers, including nonlinear spectroscopies. The following section addresses the use of x-rays for diffraction studies aimed at structural detenninations. Lastly, passing reference is made to other optical teclmiques such as ellipsometry and NMR, and to spectroscopies that only partly depend on photons. 

Monolayers of alkanetliiols adsorbed on gold, prepared by immersing tire substrate into solution, have been characterized by a large number of different surface analytical teclmiques. The lateral order in such layers has been investigated using electron [1431, helium [144, 1451 and x-ray [146, 1471 diffraction, as well as witli scanning probe microscopies [122, 1481. Infonnation about tire orientation of tire alkyl chains has been obtained by ellipsometry [149], infrared (IR) spectroscopy [150, 151] and NEXAFS [152]. 

Infrared (IR) spectroscopy and elUpsometry are used to measure the thickness of thin films with angstrom resolution. Ellipsometry has proven to be very useful in studies of dy-... 

Optical Methods Reflectance and ellipsometry snffer from lack of a theory at the molecnlar level. The same is true for SERS and SHG. The main advances will be in the nse of far-IR spectroscopy and SFG. SFG measurements performed with femtosecond lasers open np new possibilities for time-resolved adsorbate stndies. 

It has been found that various material properties are thickness-dependent. Raman experiments show a dependence on the type of substrate (glass, c-Si, stainless steel, ITO on glass) and on the thickness (up to 1 /nm) of the films [392,393]. Recent transmission electron microscopy (TEM) results also show this [394]. This is in contrast to other results, where these effects are negligible for thicknesses larger than 10 nm [395, 396], as is also confirmed by ellipsometry [397] and IR absorption [398] studies. 

A number of methods are available for the characterization and examination of SAMs as well as for the observation of the reactions with the immobilized biomolecules. Only some of these methods are mentioned briefly here. These include surface plasmon resonance (SPR) [46], quartz crystal microbalance (QCM) [47,48], ellipsometry [12,49], contact angle measurement [50], infrared spectroscopy (FT-IR) [51,52], Raman spectroscopy [53], scanning tunneling microscopy (STM) [54], atomic force microscopy (AFM) [55,56], sum frequency spectroscopy. X-ray photoelectron spectroscopy (XPS) [57, 58], surface acoustic wave and acoustic plate mode devices, confocal imaging and optical microscopy, low-angle X-ray reflectometry, electrochemical methods [59] and Raster electron microscopy [60]. 

The adsorption of alkyl and aryl isocyanides on Au film [26, 32, 33], powder [36, 37] and nanoparticles [39, 41, 42] has been studied using several different techniques IR methods (RAIR, ATR-IR, DRIFT), Raman methods (SERS), X-ray methods (NEXAFS), ellipsometry (OE, SWE) and contact angle measurements (ACA). The gold surface is not oxidized under normal conditions consequently, the experiments were performed in air at room temperature. The gold film was obtained by physical vapor deposition of 100-200 nm of gold on different substrates glass [28, 33], mica [33], silicon [25, 27, 31, 32], ZnSe crystal [26]. A... 

A variety of surface-sensitive spectroscopic and microscopic methods were critical in the investigation of these systems. In the work by Advincula et al, the composition, thickness, physical and thermal properties, and morphology of the tethered polymer brushes were carefully analyzed [72]. A variety of surface-sensitive techniques such as ellipsometry, contact angle measurements, AFM, quartz crystal microbalance (QCM), FT-IR grazing incidence... 

By also using the LASIP procedure, grafted PS-b-PI and PBd-b-PS block copolymers have been prepared (Fig. 7) [72]. Using silane and thiol-DPE initiators, polymerization was carried out on the SiOx and Au surface by sequential addition of monomers. Typically, after allowing this first reaction to reach completion, the second monomer was added to the living anion, and polymerization of the second block was allowed to proceed. The polymerization was also investigated by SPS [80], AFM, ellipsometry, FT-IR, and XPS. The schematic diagram for the reaction on Au surfaces and the formation of the block copolymers is shown in Fig. 6. The results are summarized in Table 2. 

The SiC Schottky diodes and capacitors that have been processed by the authors were processed on either 6H or 4H substrates (n-type, about 1 x 10 cm ) with a 5-10- m n-type epilayer (2-6 x lO cm" ) [123, 124]. A thermal oxide was grown and holes were etched for the metal contacts. In the case of the Schottky sensors, the SiC surface was exposed to ozone for 10 minutes before deposition of the contact metal. This ozone treatment produces a native silicon dioxide of 10 1 A, as measured by ellipsometry [74, 75]. The MISiC-FET sensors (Figure 2.9) were processed on 4H-SiC, as previously described [125]. The catalytic metal contacts consisted of 10-nm TaSiyiOO-nm Pt, porous Pt, or porous Ir deposited by sputtering or by e-gun. 

Another interesting and different type of catalysis is involved in the catalyzed reconstruction of an indium oxide overlayer on indium. This study was alluded to earlier in the discussion of acetate ion species formed on indium oxide by chemisorption from several torr of acetic acid gas. At low partial pressures of acetic acid (<< 0.1 torr) the reversible adsorption of acetic acid catalyzes the reconstruction of a thin ( 10-15A), porous indium oxide overlayer to a defect-free (no pin holes) film as judged by pinhole sensitive tunnel junction measurements. Some clues as to the mechanism were obtained from IR plus Auger and electron loss spectroscopy as well as ellipsometry measurements. The overall process is shown in Fig. 8. This is an example where processes in the substrate themselves can be usefully catalyzed. 

Chemical state characterization IR and Raman Spectroscopy, FT-IR, EELS, XPS, SIMS, ESDIAD, ellipsometry, and laser fluorescence... 

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