Plasma hydrogen-argon

Hansen, S.H., Larsen, E.H., Pritzi, G. and Cornett, C. (1992) Separation of seven arsenic compounds by high performance liquid chromatography with on-line detection by hydrogen-argon flame atomic absorption spectrometry and inductively coupled plasma mass spectrometry./. Anal. At. Spectrom., 1, 629-634. 

Exposing a polymer surface to various kinds of plasmas can modify polymer surfaces. Plasmas of argon, oxygen, hydrogen, and air are frequently used in plasma surface modification of polymers. Plasmas of non-polymer-forming gases are used in... 

Figure 18.8 Surface contact angle changes of PTFE with exposure time in an RF plasma of argon and hydrogen mixture 1 seem argon, 1 seem hydrogen, lOOmtorr, 7W RF, and 2 min treatment.

Table 10-9. Conversion of Coal in Thermal Plasma of Argon, Hydrogen, and Their Mixtures...

Direct Pyrolysis of Coal with Production of Acetylene (C2H2) in Arc Plasma of Argon and Hydrogen... 

Other gases used in RIE include oxygen, hydrogen, argon, helium, and nitrogen. These have roles in modifying plasma chemistry and physics, heat transfer, and surface chemistry. Oxyhalides typically form WO , Fy type etch products, and CO2 and H2O are generated as photoresist mask is etched. 

Cell attachment and proliferation hESC attachment and proliferation were increased on randomly oriented plasma-modified (hydrogen, argon, and oxygen) polyurethane fibers, while contact-guided cell migration was observed on aligned ones. Zanden et al. Morphology/composition... 

A schematic illustration of a typical inlet apparatus for separating volatile hydrides from the analyte solution, in which they are generated upon reduction with sodium tetrahydroborate. When the mixed analyte solution containing volatile hydrides enters the main part of the gas/liquid separator, the volatiles are released and mix with argon sweep and makeup gas, with which they are transported to the center of the plasma. The unwanted analyte solution drains from the end of the gas/liquid separator. The actual construction details of these gas/liquid separators can vary considerably, but all serve the same purpose. In some of them, there can be an intermediate stage for removal of air and hydrogen from the hydrides before the latter are sent to the plasma. 

Acetylene traditionally has been made from coal (coke) via the calcium carbide process. However, laboratory and bench-scale experiments have demonstrated the technical feasibiUty of producing the acetylene by the direct pyrolysis of coal. Researchers in Great Britain (24,28), India (25), and Japan (27) reported appreciable yields of acetylene from the pyrolysis of coal in a hydrogen-enhanced argon plasma. In subsequent work (29), it was shown that the yields could be dramatically increased through the use of a pure hydrogen plasma. 

Beta SiC powder from the decomposition of methyl-trichlorosilane (MTS) in the presence of hydrogen in an argon plasma. Also from the gaseous thermal decomposition of tetramethylsilane, Si(CH3)4, in a flowthrough reactor between 850 and 1500°CP 1 and by the reaction of acetylene and silane. 

In the plasma reactor dedicated for intrinsic material deposition (2 in Fig. 5), only hydrogen and silane are used, along with argon. A mixture of trimethylboron (5% TMB in H2), SiHa, and methane (CH4) is used in the / -plasma reactor (3 in Fig. 5). Diborane can also be used. A mixture of phosphine [PH3 (1% in H2)] and SIH4 is used in an n-plasma reactor (4 in Fig. 5). All gases are of 6.0 quality (99.9999% pure) if available from manufacturers, and otherwise as pure as possible. 

In the ASTER system a data series is measured for an argon and a hydrogen plasma running at 13.56 MHz, in which the power (5-30 W) and pressure (5-50 Pa) are varied [265,295], The probe tip is positioned exactly between powered and grounded electrode, at the center of the discharge. 

The plasma potential determined from I-V data for argon increases linearly from about 24 to 27 V with increasing power at a pressure of 0.05 mbar. At the highest pressure of 0.35 mbar these values have shifted downwards by about 2 V only. For the hydrogen discharge similar behavior is observed, with an increase... 

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