Hydrocarbons chemical vapor deposition

Titanium carbide may also be made by the reaction at high temperature of titanium with carbon titanium tetrachloride with organic compounds such as methane, chloroform, or poly(vinyl chloride) titanium disulfide [12039-13-3] with carbon organotitanates with carbon precursor polymers (31) and titanium tetrachloride with hydrogen and carbon monoxide. Much of this work is directed toward the production of ultrafine (<1 jim) powders. The reaction of titanium tetrachloride with a hydrocarbon-hydrogen mixture at ca 1000°C is used for the chemical vapor deposition (CVD) of thin carbide films used in wear-resistant coatings. 

Carbon Composites. In this class of materials, carbon or graphite fibers are embedded in a carbon or graphite matrix. The matrix can be formed by two methods chemical vapor deposition (CVD) and coking. In the case of chemical vapor deposition (see Film deposition techniques) a hydrocarbon gas is introduced into a reaction chamber in which carbon formed from the decomposition of the gas condenses on the surface of carbon fibers. An alternative method is to mold a carbon fiber—resin mixture into shape and coke the resin precursor at high temperatures and then foUow with CVD. In both methods the process has to be repeated until a desired density is obtained. 

Of the many forms of carbon and graphite produced commercially, only pyrolytic graphite (8,9) is produced from the gas phase via the pyrolysis of hydrocarbons. The process for making pyrolytic graphite is referred to as the chemical vapor deposition (CVD) process. Deposition occurs on some suitable substrate, usually graphite, that is heated at high temperatures, usually in excess of 1000°C, in the presence of a hydrocarbon, eg, methane, propane, acetjiene, or benzene. 

Chemical vapor deposition (CVD) of carbon from propane is the main reaction in the fabrication of the C/C composites [1,2] and the C-SiC functionally graded material [3,4,5]. The carbon deposition rate from propane is high compared with those from other aliphatic hydrocarbons [4]. Propane is rapidly decomposed in the gas phase and various hydrocarbons are formed independently of the film growth in the CVD reactor. The propane concentration distribution is determined by the gas-phase kinetics. The gas-phase reaction model, in addition to the film growth reaction model, is required for the numerical simulation of the CVD reactor for designing and controlling purposes. Therefore, a compact gas-phase reaction model is preferred. The authors proposed the procedure to reduce an elementary reaction model consisting of hundreds of reactions to a compact model objectively [6]. In this study, the procedure is applied to propane pyrolysis for carbon CVD and a compact gas-phase reaction model is built by the proposed procedure and the kinetic parameters are determined from the experimental results. 

The radio-frequency glow-discharge method [30-34] has been the most used method in the study of a-C H films. In this chapter, it is referred to as RFPECVD (radio frequency plasma enhanced chemical vapor deposition). Film deposition by RFPECVD is usually performed in a parallel-plate reactor, as shown in Figure 1. The plasma discharge is established between an RF-powered electrode and the other one, which is maintained at ground potential. The hydrocarbon gas or vapor is fed at a controlled flow to the reactor, which is previously evacuated to background pressures below lO"" Torr. The RF power is fed to the substrate electrode... 

Chemical vapor deposition (CVD) [27] of hydrocarbons over a metal catalyst is a method that has been used to synthesize carbon fibers, filaments, etc. for over 20 years. Large amounts of CNTs can be formed by catalytic CVD of acetylene over Co and Fe catalysts on silica or zeolite. 

There are many chemically reacting flow situations in which a reactive stream flows interior to a channel or duct. Two such examples are illustrated in Figs. 1.4 and 1.6, which consider flow in a catalytic-combustion monolith [28,156,168,259,322] and in the channels of a solid-oxide fuel cell. Other examples include the catalytic converters in automobiles. Certainly there are many industrial chemical processes that involve reactive flow tubular reactors. Innovative new short-contact-time processes use flow in catalytic monoliths to convert raw hydrocarbons to higher-value chemical feedstocks [37,99,100,173,184,436, 447]. Certain types of chemical-vapor-deposition reactors use a channel to direct flow over a wafer where a thin film is grown or deposited [219]. Flow reactors used in the laboratory to study gas-phase chemical kinetics usually strive to achieve plug-flow conditions and to minimize wall-chemistry effects. Nevertheless, boundary-layer simulations can be used to verify the flow condition or to account for non-ideal behavior [147]. 

M.R. Pederson, K.A. Jackson, and W.E. Pickett. Local-Density-Approximation-Based Simulations of Hydrocarbon Interactions with Applications to Diamond Chemical Vapor Deposition. Phys. Rev., B44(8) 3891-3899,1991. 

CHC CHCC CNC coc CP AC CPR CPU CVD CW Catalytic hydrogen combustion Catalytic hydrocarbon combustion Computerized Numeric Control Cyclo olefin copolymer Center for Process Analytical Chemistry Catalytic plate reactor Central processing unit Chemical vapor deposition Continous wave... 

Carbon deposition occurs on the surface of a substrate inserted into the carbonization system using hydrocarbon gases, such as methane and propane [45], This process is a kind of chemical vapor deposition (CVD) and the products are called pyrolytic carbons. In order to control the structure, the deposition conditions have to be controlled. The deposition can occur on either static or dynamic substrates. In the former, the substrate is placed in a furnace, which is heated either by direct passing of electric currents or from the surroundings. In the latter, small substrate particles are fluidized... 

By chemical vapor deposition from hydrocarbon precursors in the presence of a catalyst followed by high-temperature thermal treatment. 

The adsorption of hydrocarbon molecules on Si surfaces is an interesting topic of study under various viewpoints. For example, a thin hydrocarbon film coating Si may be applied as a low dielectric in microelectronics and may passivate the surface if covalent bonds are formed between Si atoms and the adsorbate species. Further, unsaturated hydrocarbons play an important role as precursor species for chemical vapor deposition (CVD) of diamond - like films on the Si surface, and of silicon carbide (SiC). 

The most common method for the production of carbon nanotubes is hydrocarbon-based chemical vapor deposition (CVD) [97] and adaptations of the CVD process [98, 99], where the nanotubes are formed by the dissolution of elemental carbon into metal nanoclusters followed by precipitation into nanotubes [100]. The CVD method is used to produce multiwalled carbon nanotubes (MWCNTs) [101] and double-walled carbon nanotubes (DWCNTs) [102] as well as SWCNTs [103], The biomedical applications of CNTs have been made possible through surface functionalization of CNTs, which has led to drug and vaccine delivery applications [104,105],... 

T. Schwarz-Selinger, A. von Keudell, W. Jacob Plasma chemical vapor deposition of hydrocarbon films The influence of hydrocarbon source gas on the film properties. J. Appl. Phys. 86, 3988 (1999)... 

The chemical dynamics, reactivity, and stability of carbon-centered radicals play an important role in understanding the formation of polycyclic aromatic hydrocarbons (PAHs), their hydrogen-dehcient precursor molecules, and carbonaceous nanostructures from the bottom up in extreme environments. These range from high-temperature combustion flames (up to a few 1000 K) and chemical vapor deposition of diamonds to more exotic, extraterrestrial settings such as low-temperature (30-200 K), hydrocarbon-rich atmospheres of planets and their moons such as Jupiter, Saturn, Uranus, Neptune, Pluto, and Titan, as well as cold molecular clouds holding temperatures as low as 10... 

Chemical vapor deposition a monolith is exposed to volatiles, for example (fragments of), hydrocarbons which form a deposit on the surface. The most widely encountered underlying chemistry is free radical chemistry or catalytic growth. 

Prospects for inexpensive and large-scale production of diamond increased tremendously in the mid 1970s when researchers discovered that diamond can be grown as thin coatings at low deposition pressures (10 -10 Pa) from hydrocarbon/hydrogen mixtures by chemical vapor deposition (CVD). Since then, there has been an explosion in diamond and related- material research with the expectation that CVD will allow faster, cheaper, and easier production of diamond. CVD diamond technology was proved to be more versatile in coating intricate shapes and could be less expensive than HPHT. " ... 

The term pyrolytic carbon can be applied to carbon filaments, carbon blacks, and carbon films, as well as to the more massive deposits which are the subject of this section. Pyrocarbon materials, made by chemical vapor deposition (CVD), vary in density, properties, and structure as much as the bulk materials discussed in 17.3.4.1. A heated hydrocarbon gas decomposes into an entire series of molecular species with a wide spectrum of carbon contents and molecular weights Within this pyrolyzing atmosphere, droplets form that pyrolyze and condense on a nearby surface, or large carbonaceous complexes may condense directly on the surface of the chamber. The former condition produces a fluffy, sooty, soft carbon, not far removed from carbon black, while the latter produces a hard solid carbon. The second of these materials is of primary interest here. The structure of the carbon produced by the CVD process has been shown to depend on the type of hydrocabon and its concentration, the pyrolysis temperature, the contact time, and the geometry of the pyrolyzing chamber. Of these, the pyrolysis temperature is perhaps the most important, but it is the nature of the chamber that conveniently divides the carbons produced into two distinct types. 

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