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Ethyl cellosolve acetate

Photoacid generator. D1 (4 wt%) was mixed with poly(glycidyl methacrylate) (PGMA) (20 wt%) in ethyl cellosolve acetate. The mixture was spin-coated on a silicon wafer and baked at 80V for 1 minute. Exposure was performed with a 600-W Xe-Hg lamp in conjunction with a UVD2 filter. The resist was developed in a mixture of methyl ethyl ketone to ethanol (7/1 w/w). [Pg.321]

Positive photoresist formulations consist of a novolac resin and an appropriate diazonaphthoquinone dissolved in organic solvent. Common solvents include ethyl cellosolve acetate, diglyme, etc. These formulations are spin-coated and then baked to remove the coating solvent. They provide films in which the sensitizer is randomly distributed through the novolac matrix. [Pg.112]

Films for lithographic evaluation were cast from methyl cellosolve acetate, and prebaked at 120°C in a vacuum oven for one hour. Patterns were developed using mixtures of ethyl cellosolve acetate and methyl cellosolve acetate. Areas exposed at a dose of 80 / 2 (20 keV) were developed with about 10% thinning of the unexposed resist. For development at 100 / 2, a contrast of 2.1 was observed (Figure 2), and the resolution at this dose was limited to about one micron. Superior sensitivity and resolution were obtained using a MA-AMS copolymer formed on the wafer by prebaking a copolymer of the methyl half ester of maleic acid with alphamethylstyrene. This latter resist system is discussed a little later. [Pg.328]

Ethyl Cellosolve acetate) see Ethyl glycol acetate... [Pg.66]

Methanol, ethanol, acetone, methylene chloride, methyl acetate, THF, methyl cellosolve, ethyl cellosolve, butyl cellosolve, n-xylene, p-xylene, and o-xylene... [Pg.117]

Acetic acid, 2-ethoxyethyl ester, see 2-Ethoxyethyl acetate Acetic acid, ethylene ester, see Vinyl acetate Acetic acid, ethyl ester, see Ethyl acetate Acetic acid, isobutyl ester, see Isobutyl acetate Acetic acid, isopentyl ester, see Isoamyl acetate Acetic acid, isopropyl ester, see Isopropyl acetate Acetic acid, 2-methoxyethyl ester, see Methyl cellosolve acetate... [Pg.1456]

EINECS 203-468-6, see Ethylenediamine EINECS 203-470-7, see Allyl alcohol EINECS 203-472-8, see Chloroacetaldehyde EINECS 203-481-7, see Methyl formate EINECS 203-523-4, see 2-Methylpentane EINECS 203-528-1, see 2-Pentanone EINECS 203-544-9, see 1-Nitropropane EINECS 203-545-4, see Vinyl acetate EINECS 203-548-0, see 2,4-Dimethylpentane EINECS 203-550-1, see 4-Methyl-2-pentanone EINECS 203-558-5, see Diisopropylamine EINECS 203-560-6, see Isopropyl ether EINECS 203-561-1, see Isopropyl acetate EINECS 203-564-8, see Acetic anhydride EINECS 203-571-6, see Maleic anhydride EINECS 203-576-3, see m-Xylene EINECS 203-598-3, see Bis(2-chloroisopropyl) ether EINECS 203-604-4, see 1,3,5-Trimethylbenzene EINECS 203-608-6, see 1,3,5-Trichlorobenzene EINECS 203-620-1, see Diisobutyl ketone EINECS 203-621-7, see sec-Hexyl acetate EINECS 203-623-8, see Bromobenzene EINECS 203-624-3, see Methylcyclohexane EINECS 203-625-9, see Toluene EINECS 203-628-5, see Chlorobenzene EINECS 203-630-6, see Cyclohexanol EINECS 203-632-7, see Phenol EINECS 203-686-1, see Propyl acetate EINECS 203-692-4, see Pentane EINECS 203-694-5, see 1-Pentene EINECS 203-695-0, see cis-2-Pentene EINECS 203-699-2, see Butylamine EINECS 203-713-7, see Methyl cellosolve EINECS 203-714-2, see Methylal EINECS 203-716-3, see Diethylamine EINECS 203-721-0, see Ethyl formate EINECS 203-726-8, see Tetrahydrofuran EINECS 203-729-4, see Thiophene EINECS 203-767-1, see 2-Heptanone EINECS 203-772-9, see Methyl cellosolve acetate EINECS 203-777-6, see Hexane EINECS 203-799-6, see 2-Chloroethyl vinyl ether EINECS 203-804-1, see 2-Ethoxyethanol EINECS 203-806-2, see Cyclohexane EINECS 203-807-8, see Cyclohexene EINECS 203-809-9, see Pyridine EINECS 203-815-1, see Morpholine EINECS 203-839-2, see 2-Ethoxyethyl acetate EINECS 203-870-1, see Bis(2-chloroethyl) ether EINECS 203-892-1, see Octane EINECS 203-893-7, see 1-Octene EINECS 203-905-0, see 2-Butoxyethanol EINECS 203-913-4, see Nonane EINECS 203-920-2, see Bis(2-chloroethoxy)methane EINECS 203-967-9, see Dodecane EINECS 204-066-3, see 2-Methylpropene EINECS 204-112-2, see Triphenyl phosphate EINECS 204-211-0, see Bis(2-ethylhexyl) phthalate EINECS 204-258-7, see l,3-Dichloro-5,5-dimethylhydantoin... [Pg.1482]

Acetamido-4-amino-6-chloro-s-triazine, see Atrazine Acetanilide, see Aniline, Chlorobenzene, Vinclozolin Acetic acid, see Acenaphthene, Acetaldehyde, Acetic anhydride. Acetone, Acetonitrile, Acrolein, Acrylonitrile, Aldicarb. Amyl acetate, sec-Amyl acetate, Bis(2-ethylhexyl) phthalate. Butyl acetate, sec-Butyl acetate, ferf-Butyl acetate, 2-Chlorophenol, Diazinon. 2,4-Dimethylphenol, 2,4-Dinitrophenol, 2,4-Dinitrotoluene, 1,4-Dioxane, 1,2-Diphenylhydrazine, Esfenvalerate. Ethyl acetate, Flucvthrinate. Formic acid, sec-Hexyl acetate. Isopropyl acetate, Isoamyl acetate. Isobutyl acetate, Methanol. Methyl acetate. 2-Methvl-2-butene. Methyl ferf-butvl ether. Methyl cellosolve acetate. 2-Methvlphenol. Methomvl. 4-Nitrophenol, Pentachlorophenol, Phenol. Propyl acetate. 1,1,1-Trichloroethane, Vinyl acetate. Vinyl chloride Acetoacetic acid, see Mevinphos Acetone, see Acrolein. Acrylonitrile. Atrazine. Butane. [Pg.1518]

Synonyms Cellosolve acetate ethylene glycol monoethyl ether acetate EGEEA 2-ethoxy ethanol acetate 2-EEA EEA EEAc ethyl glycol acetate... [Pg.304]

Figure 2. Contrast curve for the copolymer of Figure 1. Films were cast from methyl cellosolve acetate, prebaked at 120°C (in vacuum), and developed using a mixture of ethyl and methyl cellosolve acetates. Incident doses of 20 keV electrons were imposed on a film about one micrometer thick. Figure 2. Contrast curve for the copolymer of Figure 1. Films were cast from methyl cellosolve acetate, prebaked at 120°C (in vacuum), and developed using a mixture of ethyl and methyl cellosolve acetates. Incident doses of 20 keV electrons were imposed on a film about one micrometer thick.
Fig. 97. Solvent retained by nitrocellulose films (50/i thickness) after exposure to air at 25°C (Baelz [48]). I—Cyclohexenyl acetate, II—methyl cyclohexanone, III—diacetone alcohol, IV—cyclohexanone, V—cellosolve acetate, VI—amyl acetate-ethyl alcohol I 1, VII—amyl acetate, VIII— methyl cellosolve acetate, IX—amyl acetate-toluene 1 1, X—butyl acetate-ethyl alcohol 1 1, XI—butyl acetate, XII—cellosolve, XIII—methyl-ethyl ketone, XIV—cellosolve-toluene 1 1, XV—methyl cellosolve, XVI—ethyl acetate, XVII—acetone. Fig. 97. Solvent retained by nitrocellulose films (50/i thickness) after exposure to air at 25°C (Baelz [48]). I—Cyclohexenyl acetate, II—methyl cyclohexanone, III—diacetone alcohol, IV—cyclohexanone, V—cellosolve acetate, VI—amyl acetate-ethyl alcohol I 1, VII—amyl acetate, VIII— methyl cellosolve acetate, IX—amyl acetate-toluene 1 1, X—butyl acetate-ethyl alcohol 1 1, XI—butyl acetate, XII—cellosolve, XIII—methyl-ethyl ketone, XIV—cellosolve-toluene 1 1, XV—methyl cellosolve, XVI—ethyl acetate, XVII—acetone.
The specimens were coated with a blend of the carboxylated polyester and second polymer in a solvent (10% solids), which, when possible, consisted of a conventional lacquer solvent (74.2% toluene, 7.4% butyl alcohol, 7.4% Solvesso 100 solvent, 3.7% ethyl acetate, 3.7% butyl acetate, and 3.6 Cellosolve acetate). If the second polymer was not soluble (polysulfone, polycarbonates, PPO), chloroform was used. The coatings were dried for 1 hour at room temperature and then for 2 hours in an oven at 115°C. The coating thickness was about 0.5 mil. [Pg.574]

The complexes are very soluble in methanol, ethanol, butanol, methyl Cellosolve (2-methoxyethanol), and ethyl Cellosolve (2-ethoxyethanol), and to a fair degree, quite soluble in 1,2-dimethoxyethane and di- and triglyme. They are initially quite soluble in tetrahydrofuran, acetone, pyridine, nitro-methane, acetonitrile, dimethyl sulfoxide, and iV,A/-dimethyl-formamide, but usually precipitation of the nickel halide-solvent complex occurs if attempts are made to prepare moderately concentrated solutions in these solvents. They are only very slightly soluble, or are quite insoluble in dioxane, ethyl ether, hexane, dichloromethane, ethyl acetate, and methyl- and butyl-cellosolve acetate (2-methoxyethyl and 2-butoxyethyl acetate). [Pg.164]

Methyl Cellosolve Acetate Methyl Ethyl Ketone ifc 365 <112 <112 <112 0.79 i ... [Pg.113]

Methyl Isobutyl Ketone Methyl Cellosolve Acetate Ethyl Digol... [Pg.1084]

Cellosolve acetate 2-ethoxy ethyl acetate). CAS 111-15-9. CH3COOCH2CH2OC2H5. Properties Colorless liquid pleasant esterlike odor. Bp 156.3C, d 0.9748 (20/20C), bulk d 8.1 lb/gal (20C), refr index 1.4030 (25C), viscosity 1.32 cP (20C), flash p 120F (48.9C), fp-61.7C, vap press 2 mm Hg (20C). Miscible with aromatic hydrocarbons sbghtly miscible with water. Combustible. Grade Technical. [Pg.529]

Registered trade name(s) 2-butoxyethanol acetate acetic acid, 2-butoxy ethyl ester butoxy ethyl acetate butyl glycol acetate ethylene glycol butyl ether acetate glycol monobutyl ether acetate Butyl Cellosolve acetate Ektasolve EB acetate Eastman EB Acetate No data ... [Pg.310]

NB - nitro benzene AP - acetophenone IP - isophorone BL - butyl lactate CHX - cyclohexanone FF - furfural MEK - methyl ethyl ketone CA - cellosolve acetate... [Pg.48]

CELLOSOLVE [Union Carbide] (110-80-5) see ethylene glycol monoethyl ether. CELLOSOLVE ACETATE [Union Carbide] (111-15-9) see ethylene glycol ethyl efiier acetate. [Pg.223]

Ethylene glycol monoethyl ether acetate (2-ethoxyethyl acetate) EGMEA 111-15-9 ethyl glycol acetate cellosolve acetate... [Pg.118]

Printing plates have been prepared which depend on the photopolymerization of allyl esters to generate an image [81]. As an etch resist for printed circuits, a solution of a prepolymer of allyl methacrylate, benzil, and 4,4 -bis(dimethyl-amino)benzophenone in methyl isobutyl ketone-cellosolve acetate was coated on a substrate. After exposure to UV, the image was developed with methyl ethyl ketone [81]. [Pg.310]

Acetic acid (glacial), butanol, cyclohexane, dioxane, ethyl Cellosolve, ethylene chloride, methanol, toluene/ ethanol (60 40 wt), xylene/ butanol (60 40 wt)... [Pg.915]

Isobutanol Ethyl Cellosolve Methyl acetate Acetone -Propanol Methyl Cellosolve Isopropanol Ethanol MEG Methanol... [Pg.178]

Properties Solid sol. in butyl Cellosolve acetate, 2-phenoxyethyl methacrylate, tetrahydrofurfuryl acrylafe, efhoxylafeds bisphenol Adiacrylate, propoxylated allyl methacrylate, tetrahydrofurfuryl mefhacrylate 1-methoxy 2-propanol, 2(2-ethoxyethoxy)ethyl acetate, dipropylene glycol monomethyl ether, epoxy acrylate oligomer blended with 1,6 hexanediol diacrylate m.p. 78 C 0.04% acid... [Pg.174]

Synonyms Acetic acid 2-ethoxyethyl ester Cellosolve acetate EEA 2-EEA EGA Ethoxy acetate 2-Ethoxyethanol acetate Ethoxyethyl acetate 2-Ethoxyethyl acetate 3-Ethoxyethyl acetate Ethylene glycol ethyl ether acetate Ethylene glycol monoethyl ether acetate Ethyl glycol acetate Glycol monoethyl ether acetate Oxytol acetate Classification Carboxylic acid ester Definition Ester of ethoxyethanol and acetic acid Empirical CeFlizOs Formula CH2COOCH2CH2OCH2CH,... [Pg.1107]

Ethyl acetate Butyl acetate Cellosolve acetate... [Pg.114]

Ethyl Acetate (99.5%) CELLOSOLVE Acetate Methyl PRORASOL Acetate Ester EEP... [Pg.843]


See other pages where Ethyl cellosolve acetate is mentioned: [Pg.99]    [Pg.266]    [Pg.255]    [Pg.255]    [Pg.68]    [Pg.107]    [Pg.46]    [Pg.99]    [Pg.266]    [Pg.255]    [Pg.255]    [Pg.68]    [Pg.107]    [Pg.46]    [Pg.1458]    [Pg.464]    [Pg.463]    [Pg.603]    [Pg.464]    [Pg.1557]    [Pg.40]    [Pg.217]   
See also in sourсe #XX -- [ Pg.104 , Pg.255 ]

See also in sourсe #XX -- [ Pg.104 , Pg.255 ]




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