Cathodic arc

Fig. 12. Arc vaporization source configurations (a) vacuum arc/molten anode, and (b) cathodic arc.

To evaporate the source material, various heating methods are used such as resistance heating, electron beam, pulsed excimer laser, or cathodic arc (where the source is the cathode). 

McCuUoch, D. G. and Merchant, A. R., The Effect of Annealing on the Structure of Cathodic Arc Deposited Amorphous Carbon Nitride Films, Thin Solid Films, Vol. 290, 1996, pp. 99-102. 

Hyodo, H., Yamamoto, T., and Toyoguchi, T., "Properties of Tetrahedral Amorphous Carbon Film by Filtered Cathodic Arc Deposition for Disk Overcoat, IEEE Trans. Magn., Vol. 37, 2001,pp. 1789-1791. 

Chemical vapor deposition Plasma etching Photoresist Photolithography Resistance heating Ion implantation Spin-on glass deposition Cathodic arc Ion plating... 

A twin torch plasma furnace, where DC anode and cathode arcs were coupled together above an aluminum melt, was developed for synthesis of AIN UFPs in order to control the aluminum evaporation rate and the concentration of nitrogen atoms in the plasma column independently (19). A two-stage transferred-arc plasma reactor was built for AIN synthesis, where aluminum is evaporated in a transferred-arc plasma chamber and then reacted in a separate tubular reactor, allowing a better control of the reaction conditions (20). Arc plasma technique has been modified and... 

Alternative vacuum deposition processes that have recently been developed offer potential advantages such as higher deposition rates, improved adhesion, or better control of film stress or morphology. These processes include ion-beam sputtering (134), ion-cluster evaporation (135, 136), and cathodic-arc deposition (137). 

Martin, P.J., Bendavid, A., Netterfield, R.P., Kinder, T.J., Jahan, F. and Smith, G. (1999), Plasma deposition of tribological and optical thin film materials with a filtered cathodic arc source , Surface and Coatings Technology, 112, 257-260. 

When the ionic activity (a) is not changed in the bulk of the solution, the absolute value of concentration polarization at the cathode Arc is expressed by the difference of the potentials n and tc , hence ... 

The inverter circuit described in recent publications by Nara and Matsumura (1982) is shown in Fig. 17. It consists of an n-channel enhancement mode driver FET and a p-channel load FET produced by a hot-cathode arc-discharge decomposition of silane gas mixtures (Matsumura and... 

Nitrogen ion implantation of the carbonitride films was also carried out to further increase the nitrogen percentage in the film to obtain the desired stoichiometry of P-C N. For carbonitride films deposited by cathodic arc, no evidence... 

The Raman spectra of CNX films (with x values up to 1.22) show bands at 1098 cm-1, 1950 cm-1, due to vC-N, vC=N respectively.324 CNX films grown by a vacuum cathodic arc method (160-500°C) were characterised by IR and Raman spectra, in terms of sp3, aromatic and non-aromatic sp2 units.325 The Raman spectra of CNX films on a Co/Ni-covered substrate showed that they were mainly CNX crystallites, diameter 20-30 nm.326 Other reports have been made of characterisation of CNX films by IR and Raman spectroscopy.327,328... 

Horsky, T. Indirectly heated cathode arc discharge source for ion implantation of semiconductors. Rev. of Sci. Instrum. 69(2), 840 (1998)... 

Earlier work by Hulbert, Morrison and Klawitter (1972) confirmed that calcium zirconate ceramics implanted intramuscularly in rabbits promoted the formation of a 100-200 pm thick pseudo membrane that within 6-9 months gradually den-sified without the presence of inflammatory cells thus suggesting a high degree of biotolerance. Recent work by Liu et al. (2006) showed that nanostructured Zr02 films formed by cathodic arc deposition on silicon surfaces promote the formation of apatite when incubated in SBF. On the apatite, growth and proliferation of... 

The main deposition methods of NS-Ti02 onto stainless steels are cathodic arc deposition [532], electrophoretic deposition [533], anodic spark deposition (ASD) [534], the sol-gel method [535, 536], atmospheric pressure metal organic CVD (AP-MOCVD) [537, 538] and radio frequency (RF) magnetron sputtering [539]. Preparation methods and applications of NS-Ti02 thin films on stainless steel have been summarized in Table 15. 

Cathodic arc deposition Bactericidal effect removal of Escherichia coli K12 [532]... 

B. Kepenek, U.O. . Seker, A.F. Cakir, M. Urgen, C. Tamerler, Photocatal3dic bactericidal effect of Ti02 thin films produced by cathodic arc deposition method . Key Engineering Materials, 254-256, 463 66, (2004). 

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