Filtered cathodic vacuum arc

Rolo, M. C., Andujar, J. L., Robertson, J., and MUne, W. I., Preparation of Tetrahedral Amorphous Carbon Films by Filtered Cathodic Vacuum Arc Deposition," Diamond Relat. Mater., Vol. 9,2000, pp. 668-661. 

The ta-C and a-C films are produced experimentally using a variety of PVD methods such as sputtering, laser ablation and filtered cathodic vacuum arc (FCVA) technique among which the FCVA technique attracts more attention due to high ionization yield which leads to easy control on plasma properties, high surface quality and high deposition rate which promotes this technique for different industrial applications [1]. 

Zhang, X., Liang, H., Wu, Z., Wu, X., Zhang, H., 2013. The effect of substrate bias on titanium carbide/amorphous carbon nanocomposite films deposited by filtered cathodic vacuum arc. Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with... 

X. Shi, B.K. Tay, D.I. Flynn, Z. Sun, Tribological properties of tetrahedral carbon films deposited by filtered cathodic vacuum arc technique, in Thin Films Stresses and Mechanical Properties Vi, eds. by W.W. Gerberich, et al. (Materials Research Society, Warrendale, 1997), pp. 293-298... 

ZnO films can be prepared by many techniques, including chemical vapour deposition (CVD) [135], electron beam evaporation [136], molecular beam epitaxy (MBE) [137], pulsed laser deposition (PLD) [138], sol-gel [139], spray pyrolysis [140], sputtering [141] and chemical bath deposition [142]. Thermal oxidation of metallic Zn [143-149], ZnS or ZnSe [150-153] films has been used to prepare ZnO films. The Zn precursor films were deposited onto the substrates (glass, sapphire or Si) by magnetron sputtering, thermal/ electron-beam evaporation or filtered cathodic vacuum arc technique. Oxidation treatment was normally conducted in air or oxygen atmospheres in a wide temperature range typically from 300 to 1000°C. 

D.A. Baldwin, S. Falahella, Deposition Processes Using a New Filtered Cathodic Arc Source, in Proceedings of the 38th Annual Technical Conference, Society of Vacuum Coaters, 1995, p. 309. 

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