Thin-film pulsed laser deposition

For ceramic materials, there are many approaches available to a researcher for fabrication, including the simple pellet press, tape casting, screen printing, sputter deposition (especially PZT and ZnO), sol-gel techniques for thin films, pulsed-laser deposition, and the hygrothermal technique [10] for deposition of quality PZT onto titanium. 

Ramsey, M. E., Poindexter, E., Pelt, J. S., Marin, J., and Durbin, S. M., Hydrophobic CNx Thin Film Growth by Inductively-coupled RF Plasma Enhanced Pulsed Laser Deposition, Thin Solid Films, Vol. 360, No. 1-2,2000, pp. 82-88. 

Schubert J, Schdning MJ, Schmidt C, Siegert M, Mesters St, Zander W, Kordos P, Liith H, Legin A, Mourzina YG, Seleznev B, Vlasov YG (1999) Chalcogenide-based thin film sensors prepared by pulsed laser deposition technique. Appl Phys A Mater Sci Process 69 803-805... 

H.S. Kwok, X.W. Sun, and D.H. Kim, Pulsed laser deposited crystalline ultrathin indium tin oxide films and their conduction mechanisms, Thin Solid Films, 335 299-302, 1998. 

The pulsed laser deposition (PLD) technique is widely used for inorganic materials but is beconting increasingly employed for the preparation of thin films of polymers... 

OtherCells Several other cells with zinc as an active material have been studied in recent years. The zinc-containing compounds were used as anodes in lithium-ion batteries [353-355]. One such compound is nanocrystalline ZnFe204 and AgxZnFe204 (x = 0.16, 0.37, and 0.50) [355], which have been prepared as thin films, by reactive pulsed laser deposition. Especially good performance in the battery of the Ago.3yZnFe204 film electrode has been shown. 

Hontsu, S., T. Matsumoto, J. Ishii, M. Nakamori, H. Tabata, and T. Kawai, Electrical properties of hydroxyapatite thin films grown by pulsed laser deposition. Thin Sol. Films, 295, 214-217 (1997). 

LAPS was introduced by Sato et al. [155]. The detection of heavy metal ions by thin films of chalcogenide-glass membranes using the pulsed laser deposition method (PLD) was reported by Mourzina et al. [156]. The PLD technique was also introduced to evaporate A1203 as a pH-sensitive material for LAPS devices [157]. The first practical application of the above-described LAPS card was demonstrated by Kloock et al. for a comparative study of Cd-sensitive chalcogenide glasses for ISFETs, LAPS and pISEs (ion-selective electrodes) [158]. 

Y. Mourzina, T. Yoshinobu, J. Schubert, H. Liith, H. Iwasaki and M.J. Schoning, Ion-selective light-addressable potentiometric sensor (LAPS) with chalcogenide thin film prepared by pulsed laser deposition, Sens. Actuators B Chem., 80(2) (2001) 136-140. 

M. Schoning, Y.G. Mourzina, J. Schubert, W. Zander, A. Legin, Y.G. Vlasov and H. Luth, Pulsed laser deposition—an innovative technique for preparing inorganic thin films, Electroanalysis, 13(8-9) (2001) 727-732. 

The preparation of c-axis aligned or even epitaxial RNi2B2C thin films has been performed using both, pulsed laser deposition (PLD Cimberle et al., 1997 Hase et al., 1997) and magnetron sputtering technique (Arisawa et al., 1994 Andreone... 

ZnO thin films can be prepared by a variety of techniques such as magnetron sputtering, chemical vapor deposition, pulsed-laser deposition, molecular beam epitaxy, spray-pyrolysis, and (electro-)chemical deposition [24,74]. In this book, sputtering (Chap. 5), chemical vapor deposition (Chap. 6), and pulsed-laser deposition (Chap. 7) are described in detail, since these methods lead to the best ZnO films concerning high conductivity and transparency. The first two methods allow also large area depositions making them the industrially most advanced deposition techniques for ZnO. ZnO films easily crystallize, which is different for instance compared with ITO films that can... 

Pulsed Laser Deposition of ZnO-Based Thin Films... 

Pulsed laser deposition (PLD) [1-3] uses high-power laser pulses with an energy density of more than 108 W cm 2 to melt, evaporate, excite, and ionize material from a single target. This laser ablation produces a transient, highly luminous plasma plume that expands rapidly away from the target surface. The ablated material is collected on an appropriately placed substrate surface upon which it condenses and a thin film nucleates and grows. 

J.T. Cheung, History and Fundamentals of Pulsed Laser Deposition. In Pulsed Laser Deposition of Thin Films, ed. by D.B. Chrisey, G.H. Hubler (Wiley, New York Chichester Brisbane Toronto Singapore 1994) pp 1-22... 

A.E. Tselev, Cross-beam pulsed laser deposition as a method for preparation of thin films of metastable solid solutions. PhD Thesis, TU Dresden, Dresden (2000)... 

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