Sensors thin film

Schubert J, Schdning MJ, Schmidt C, Siegert M, Mesters St, Zander W, Kordos P, Liith H, Legin A, Mourzina YG, Seleznev B, Vlasov YG (1999) Chalcogenide-based thin film sensors prepared by pulsed laser deposition technique. Appl Phys A Mater Sci Process 69 803-805... 

Reactor type Chip reactor with thin-film sensors and membrane Catalyst material Pt... 

Mills A., Chang Q., Fluorescent plastic thin-film sensor for carbon dioxide, Analyst 1993 118 839-843. 

A new generation of detectors has been developed with NbSi thin-film sensors (instead of the NTD sensors for present detectors). Each detector consists of a Ge crystal with two NbSi sensors acting also as electrodes for charge collection. These thin-film sensors are sensitive to the athermal component of the phonon signal, acting as near-surface interaction tag [49],... 

Platinum thin-film sensors are available in a broad variety of forms. Depending on the proposed application, the sensor may be unhoused, encapsulated in ceramic, configured as a surface mounted device (SMD) or located within a plastic housing with rigid pins. An overview of the variety of different forms currently available is given below (Fig. 5.2). 

Even conventional hotplates can be fitted with a continuously variable temperature control thanks to platinum thin-film sensors. The encapsulated platinum sensor is positioned so that it is in contact with the cast iron plate from below and thus able to register the temperature of the hotplate. Normally the power supplied to the plate is regulated by a stage switch. The increased control sensitivity is made possible by incorporating electronic circuitry capable of interpreting and acting upon the sensor signals. 

M. Stankova, X. Vilanova, E. Llobet, J. Calderer, C. Bittencourt, J. J. Pireaux, and X. Correig, Influence of the annealing and operating temperatures on the gas-sensing properties of rf sputtered WO3 thin-film sensors. Sensors Actuators 105(2), 271—277 (2005). 

Pb2+, Cd2+, Zn2+, Fe3+ 12 Chalcogenide ISEs Solid-state thin-film sensors — [96]... 

For air monitoring a complete miniaturized system made by silicon micromachining has been proposed [86]. Valves,gas fluidics, filters, thin film sensors and pumps are integrated in silicon and mounted on a printed circuit board (Fig. 3). The application of such systems will become apparent in the future. 

Fig. 6. Photomicrograph illustrating the assembling of the thin film sensor array with the printed circuit board, a. sensor array, b. counter electrode, c. pacer, d. channel for conductive adhesive with conducting pad of PCB, e. inlet hole for conductive adhesive,/ outlet hole for conductive adhesive, g. bonding pads...

The thin film sensors were deposited on 20 mm right angle prisms for characterization. The test apparatus was sealed to protect the film from the surrounding air and to expose the films to predetermined gas mixtures, as shown in Figure 1. The sensors consisted of three layers 40 nm gold, 600 nm W03 and 3 nm palladium. Figure 2 shows a set of spectra... 

Sysoev, V. V. Kiselev, I. Frietsch, M. Goschnick, J., Temperature gradient effect on gas discrimination power of a metal-oxide thin-film sensor microarray, Sensors 2004,... 

T. Kramer, O. Paul, Surface microma-chined ring test structures to determine mechanical properties of compressive thin films, Sensors Actuators A 92 (2001) 292-298. 

Poly-Si thin film sensor element change of output span related to output span at room temperature... 

Fig. 7.4.6 a and b Comparison of output span of poly-Si and metal (NiCr) thin-film sensor elements... 

Fig. 7.4.7 Cross section of sensor package for metal thin-film sensor used for gasoline direct injection...

The present state-of-the-art is to use a thin-film sensor for thermal air-flow meters. The thin film is deposited on a planar or cylindrical substrate. A planar substrate allows for resistor structures, which make complex measurement tasks possible, for example back-flow detection. By exploiting microsilicon technology the resistors can be located on a thin diaphragm, which results in very short response times. 

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