Pulsed laser deposition technique fabricate thin films

Only few examples of CO2 impedimetric gas sensors can be found that are fabricated by means of thin-film techniques and they use BaliOs-CuO thin films. For example,Tunney etaL (2006) obtained BaliOj-CuO thin films by pulsed laser deposition (PLD) at substrate temperatures between 400°C and 650°C. The target was 1% of CuO and 99% of BaliOj. They reported some preliminary work but further results cannot subsequently be found in the literature. 

For ceramic materials, there are many approaches available to a researcher for fabrication, including the simple pellet press, tape casting, screen printing, sputter deposition (especially PZT and ZnO), sol-gel techniques for thin films, pulsed-laser deposition, and the hygrothermal technique [10] for deposition of quality PZT onto titanium. 

It is usually difficult to investigate lithium intercalation and deintercalation behavior with composite cathodes because of the nonuniform potential distributions and unknown electrode surface area [104]. To avoid this problem, researchers replaced composite electrodes with thin-film electrodes, making vacuum techniques a tool of choice in small-scale bench top research. Many techniques have been developed for fabrication of thin-film electrodes, including chemical vapor deposition (CVD) [108-111], electrostatic spray deposition (ESD) [112-117], pulsed laser deposition (PLD) [2, 118-121], and radio frequency (RF) sputtering. Vacuum systems are typically required in each of these techniques. Each technique for fabricating LiCo02 cathodes will be addressed below. 

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