Micro-sensors

CO Resistive sensors pellistors, metal-oxide sensors Optical sensors micro-spectrometer, IR-sources, IR-detectors, IR-filters Hybrid or integrated, surface micromachining Sn02 sintered thick film (Figaro, FIS,. ..), Sn02 thin and thick film on silicon (MiCS, Microsens) IR spectroscopy (Vaisala, Honeywell,. ..)... [Pg.223]

VOC (volatile organic compound Work-function sensors, micro-spectrometer, IR-sources, IR-detectors, I R-filters Hybrid or integrated, surface micromachining... [Pg.223]

Micro flow control devices open new possibilities for the miniaturization of conventional chemical and biochemical analysis systems. The micro total analysis system (pTAS) including microfabricated detectors (e.g. silicon based chemical sensors, optical sensors), micro flow control devices and control/detec-tion circuits is a practical micro electro mechanical system (MEMS). pTAS realize very small necessary sample volume, fast response and the reduction of reagents which is very useful in chemical and medical analysis. Two approaches of monolithic and hybrid integration of these devices have been studied. Monolithic and hybrid types of flow injection analysis (FIA) systems were already demonstrated [4, 5]. The combination of the partly integrated components and discrete components is useful in many cases [6]. To fabricate such systems, bonding and assembling methods play very important roles [7]. [Pg.164]

Weigl, B.H., Kriebel, J., Mayes, K., Yager, P., Wu, C.C., Holl, M., Kenny, M., Zebert, D., Simultaneous self-referencing analyte determination in complex sample solutions using microfabricated flow structure (T-sensors). Micro Total Analysis Systems 98, Proceedings pTAS 98 Workshop, Banff, Canada, 13-16 Oct. 1998, 81-84. [Pg.429]

Bousse, L., McReynolds, R., Micromachined flow-through measurement chambers using LAPS chemical sensors. Micro Total Analysis Systems, Proceedings pTAS 94 Workshop, University of Twente, Netherlands, 21-22 Nov. 1994, 127-138. [Pg.454]

Hardness and anti-abrasiveness AFM probe, MEMS (micro-relays, acceleration sensors, micro-gripper), coating on surgery scalpels, coating on cutting tools, tab tools... [Pg.290]

Candeloro P, Carpentiero A, Cabrini S, Di Eabrizio E, Comini E, Baratto C, Faglia G, Sberveglieri G, Gerardino A. Sn02 sub-micron wires for gas sensors. Micro. Eng. 2005 78-79 178-184. [Pg.312]

Laser Doppler velocimetry (LDV) Laser Doppler velocity profile sensor Micro laser Doppler velocimetry (p-LDV)... [Pg.1826]

Mozafari, M., Moztarzadeh, F. (2011). Microstructural and Optical Properties of Spherical Lead Sulphide Quantum Dots-based Optical Sensors. Micro Nano Letters, lET, 6(3), 161-164. [Pg.98]

Micro CCD image sensor Fiberscope Micro-ultrasonic sensor Micro-tactile sensor Small size, full field image sensor Small (0.2 mm diameter) field vision scope using SMAcoil actuators Detects flaws in small pipes Detects proximity between the end of catheter and blood vessels... [Pg.191]

The anisotropic wet etching of silicon is a unique fabrication process in the MEMS field. The need to develop new processes to fabricate functional 3D microstructures in various materials is urgent for progress in microfluidic systems, micro-sensors, micro-actuators and micro-instrumentation. At present, to integrate surface micro-machined devices and standard IC devices with bulk micromachined structures to demonstrate a new functional... [Pg.172]

Silicon micromachining concerns a process that involves the removal of silicon materials using wet chemical or dry plasma process in order to create 3-D silicon or nonsilicon microstructures for making functional devices such as micro-sensors, micro-actuators, biochips, etc. [Pg.1839]

MICRO INCOHlhC signals from T SENSORS MICRO LEVEL... [Pg.38]

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